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"Backside E-Beam Probing on Nano scale devices."
Rudolf Schlangen et al. (2007)
- Rudolf Schlangen, Reiner Leihkauf, Uwe Kerst, Christian Boit, Rajesh Jain, Tahir Malik, Keneth R. Wilsher, Ted R. Lundquist, Bernd Krüger:
Backside E-Beam Probing on Nano scale devices. ITC 2007: 1-9
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