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"A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with ..."

Arthur Campos de Oliveira, Sining Pan, Kofi A. A. Makinwa (2022)

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DOI: 10.1109/ISSCC42614.2022.9731704

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-29

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  dblp key:
  - conf/isscc/OliveiraPM22
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Arthur Campos de Oliveira, Sining Pan, Kofi A. A. Makinwa:
A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h. ISSCC 2022: 1-3

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