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"A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with ..."

Meng Zhao et al. (2021)

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DOI: 10.1109/ISCAS51556.2021.9401502

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-02

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Meng Zhao, Qiancheng Zhao, Zhongjian Chen, Wengao Lu, Yacong Zhang, Guizhen Yan:
A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with On-Chip Digital Nonlinearity Calibration and Embedded EEPROM. ISCAS 2021: 1-5

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