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"Challenges of Gate Stack TDDB in Gate-All-Around Nanosheet Towards Further ..."

Huimei Zhou, Miaomiao Wang, Ernest Y. Wu (2024)

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DOI: 10.1109/IRPS48228.2024.10529474

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Huimei Zhou, Miaomiao Wang, Ernest Y. Wu:
Challenges of Gate Stack TDDB in Gate-All-Around Nanosheet Towards Further Scaling. IRPS 2024: 2

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