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"Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum ..."

D. Tiernc et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529305

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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  - conf/irps/TierncALJVSBCBR24
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D. Tiernc, Antonio Arreghini, Alicja Lesniewska, Y. Jeong, Marleen H. van der Veen, J. Stiers, N. Bazzazian, Ivan Ciofi, Geert Van den Bosch, Maarten Rosmeulen:
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND. IRPS 2024: 1-5

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