"Successive breakdown mode of time-dependent dielectric breakdown for Cu ..."

Sol-Kyu Lee et al. (2018)

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DOI: 10.1109/IRPS.2018.8353578

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-22

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Sol-Kyu Lee, Kyung-Tae Jang, Seol-Min Yi, Young-Chang Joo:
Successive breakdown mode of time-dependent dielectric breakdown for Cu interconnects and lifetime enhancement under dynamic bias stress. IRPS 2018: 4

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