"Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on ..."

Heung-Kook Ko et al. (2020)

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DOI: 10.1109/IRPS45951.2020.9128932

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Heung-Kook Ko, Sena Park, Jihyun Ryu, Sung Ryul Kim, Giwon Lee, Dongjoon Lee, Sangwoo Pae, Euncheol Lee, Yongsun Ji, Hai Jiang, Taeyoung Jeong, Taiki Uemura, Dongkyun Kwon, Hyungrok Do, Hyungu Kahng, Yoon-Sang Cho, Jiyoon Lee, Seoung Bum Kim:
Early Diagnosis and Prediction of Wafer Quality Using Machine Learning on sub-10nm Logic Technology. IRPS 2020: 1-5

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