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"The first observation of p-type electromigration failure in full ruthenium ..."

Sofie Beyne et al. (2018)

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DOI: 10.1109/IRPS.2018.8353638

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-01

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  - conf/irps/BeyneDPBAWTC18
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  - https://dblp.org/rec/conf/irps/BeyneDPBAWTC18
Sofie Beyne, Shibesh Dutta, Olalla Varela Pedreira, Niels Bosman, Christoph Adelmann, Ingrid De Wolf, Zsolt Tökei, Kristof Croes:
The first observation of p-type electromigration failure in full ruthenium interconnects. IRPS 2018: 6

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