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"Residual Vibration Analysis and Suppression for SCARA Robot Arm in ..."
Wei Min Tao et al. (2006)
- Wei Min Tao, Ming-Jun Zhang, Michael Liu, Xiao Ping Yun:
Residual Vibration Analysis and Suppression for SCARA Robot Arm in Semiconductor Manufacturing. IROS 2006: 5153-5158
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