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"Distributed modeling and simulation of 300 mm fab intrabay automation ..."
Chung-Hsien Kuo, Chien-Sheng Huang (2003)
- Chung-Hsien Kuo, Chien-Sheng Huang:
Distributed modeling and simulation of 300 mm fab intrabay automation systems using distributed agent oriented petri nets. ICRA 2003: 616-621
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