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"Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its ..."
Toshio Fukuda et al. (1998)
- Toshio Fukuda, Hiroshi Sato, Fumihito Arai, Hitoshi Iwata, Kouichi Itoigawa:
Parallel Beam Micro Sensor/Actuator Unit Using PZT Thin Films and its Application Examples. ICRA 1998: 1498-1503
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