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"A color vision system for microelectronics: Application to oxide thickness ..."
Matt Barth et al. (1986)
- Matt Barth, Srinivasan Parthasarathy, Jing Wang, Evelyn Hu, Susan Hackwood, Gerardo Beni:
A color vision system for microelectronics: Application to oxide thickness measurements. ICRA 1986: 1242-1247
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