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"WS2 transistors on 300 mm wafers with BEOL compatibility."
Tom Schram et al. (2017)
- Tom Schram, Quentin Smets, Benjamin Groven
, M. H. Heyne, E. Kunnen, A. Thiam, Katia Devriendt, Annelies Delabie, Dennis Lin, M. Lux, Daniele Chiappe, I. Asselberghs
, S. Brus, Cedric Huyghebaert, S. Sayan, A. Juncker, Matty Caymax, Iuliana P. Radu
:
WS2 transistors on 300 mm wafers with BEOL compatibility. ESSDERC 2017: 212-215
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