"BEoL integrated hafnium zirconium oxide varactors for tunable mmWave ..."

Sukhrob Abdulazhanov et al. (2022)

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DOI: 10.1109/ESSDERC55479.2022.9947182

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Sukhrob Abdulazhanov, Dang Khoa Huynh, Quang Huy Le, David Lehninger, Thomas Kämpfe, Gerald Gerlach:
BEoL integrated hafnium zirconium oxide varactors for tunable mmWave applications. ESSDERC 2022: 253-256

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