"Permittivity Characterization of Ferroelectric Thin-Film Hafnium Zirconium ..."

Sukhrob Abdulazhanov et al. (2023)

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DOI: 10.1109/DRC58590.2023.10187025

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-08

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Sukhrob Abdulazhanov, Quang Huy Le, Dang Khoa Huynh, David Lehninger, Thomas Kämpfe, Gerald Gerlach:
Permittivity Characterization of Ferroelectric Thin-Film Hafnium Zirconium Oxide Varactors up to 170 GHz. DRC 2023: 1-2

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