"Effective model-based mask fracturing for mask cost reduction."

Abde Ali Kagalwalla, Puneet Gupta (2015)

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DOI: 10.1145/2744769.2744828

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-28

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  - https://dblp.org/rec/conf/dac/KagalwallaG15
Abde Ali Kagalwalla, Puneet Gupta:
Effective model-based mask fracturing for mask cost reduction. DAC 2015: 73:1-73:6

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