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"An array-based test circuit for fully automated gate dielectric breakdown ..."

John Keane et al. (2008)

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DOI: 10.1109/CICC.2008.4672036

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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John Keane, Shrinivas Venkatraman, Paulo F. Butzen, Chris H. Kim:
An array-based test circuit for fully automated gate dielectric breakdown characterization. CICC 2008: 121-124

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