"Improving the Performance of an Electrostatically Actuated MEMS by ..."

Guchuan Zhu, Jean Lévine, Laurent Praly (2005)

Details and statistics

DOI: 10.1109/CDC.2005.1583377

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-01

a service of  Schloss Dagstuhl - Leibniz Center for Informatics