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"Modeling and control of thin film morphology using unsteady processing ..."

Martha A. Gallivan, David G. Goodwin, Richard M. Murray (2001)

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DOI: 10.1109/.2001.981122

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-06

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Martha A. Gallivan, David G. Goodwin, Richard M. Murray:
Modeling and control of thin film morphology using unsteady processing parameters: Problem formulation and initial results. CDC 2001: 1570-1576

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