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"Robust high-gain control of nonlinear reactive sputter processes."

Christian Woelfel, Peter Awakowicz, Jan Lunze (2017)

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DOI: 10.1109/CCTA.2017.8062435

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-02

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  dblp key:
  - conf/ccta/WoelfelAL17
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  - https://dblp.org/rec/conf/ccta/WoelfelAL17
Christian Woelfel, Peter Awakowicz, Jan Lunze:
Robust high-gain control of nonlinear reactive sputter processes. CCTA 2017: 25-30

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