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"Novel Optical Probing System for Quarter-micron VLSI Circuits."

Kazuyuki Ozaki et al. (1997)

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DOI: 10.1109/ATS.1997.643960

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  dblp key:
  - conf/ats/OzakiSWGUM97
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  persistent URL:
  - https://dblp.org/rec/conf/ats/OzakiSWGUM97
Kazuyuki Ozaki, Hidenori Sekiguchi, Shinichi Wakana, Yoshiro Goto, Yasutoshi Umehara, Jun Matsumoto:
Novel Optical Probing System for Quarter-micron VLSI Circuits. Asian Test Symposium 1997: 208-213

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