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"Model Based Layout Pattern Dependent Metal Filling Algorithm for Improved ..."

Subarna Sinha, Jianfeng Luo, Charles C. Chiang (2007)

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DOI: 10.1109/ASPDAC.2007.357783

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/aspdac/SinhaLC07
Subarna Sinha, Jianfeng Luo, Charles C. Chiang:
Model Based Layout Pattern Dependent Metal Filling Algorithm for Improved Chip Surface Uniformity in the Copper Process. ASP-DAC 2007: 1-6

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