"CMOS compatible MEMs process for post interconnect single chip integration ..."

Xiaoxu Kang et al. (2011)

Details and statistics

DOI: 10.1109/ASICON.2011.6157215

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-19

a service of  Schloss Dagstuhl - Leibniz Center for Informatics