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"Fabrication of silicon-based MEMS capacitive microphone structure with ..."
Xiaoxu Kang et al. (2013)
- Xiaoxu Kang, Chao Yuan, Qingyun Zuo, Changwa Yao, Shoumian Chen, Yuhang Zhao, Yilin Yan, Yuanjun Xu, Weiping Zhou:
Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer. ASICON 2013: 1-3
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