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"Fabrication of silicon-based MEMS capacitive microphone structure with ..."

Xiaoxu Kang et al. (2013)

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DOI: 10.1109/ASICON.2013.6811942

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-19

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  - conf/asicon/KangYZYCZYXZ13
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  - https://dblp.org/rec/conf/asicon/KangYZYCZYXZ13
Xiaoxu Kang, Chao Yuan, Qingyun Zuo, Changwa Yao, Shoumian Chen, Yuhang Zhao, Yilin Yan, Yuanjun Xu, Weiping Zhou:
Fabrication of silicon-based MEMS capacitive microphone structure with thin starting wafer. ASICON 2013: 1-3

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