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"Design fabrication of high-precision stage and ultrahigh-speed nanoscale ..."
Koichi Sakata et al. (2009)
- Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Kazuaki Saiki:
Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning. ACC 2009: 2254-2259
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