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"Neural network based adaptive tracking controller for a reactive ion ..."

Yubo Pei, Gary S. May (2001)

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DOI: 10.1109/ACC.2001.946019

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-05

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Yubo Pei, Gary S. May:
Neural network based adaptive tracking controller for a reactive ion etching system. ACC 2001: 1916-1921

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