"Iterative learning control design for synchronization of wafer and reticle ..."

Sandipan Mishra, William Yeh, Masayoshi Tomizuka (2008)

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DOI: 10.1109/ACC.2008.4587103

access: closed

type: Conference or Workshop Paper

metadata version: 2020-07-09

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Sandipan Mishra, William Yeh, Masayoshi Tomizuka:
Iterative learning control design for synchronization of wafer and reticle stages. ACC 2008: 3908-3913

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