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"Iterative learning control design for synchronization of wafer and reticle ..."
Sandipan Mishra, William Yeh, Masayoshi Tomizuka (2008)
- Sandipan Mishra, William Yeh, Masayoshi Tomizuka:
Iterative learning control design for synchronization of wafer and reticle stages. ACC 2008: 3908-3913
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