"Experimental evaluation of robust-control-relevance: A confrontation with ..."

Robbert van Herpen et al. (2010)

> Home

Details and statistics

DOI: 10.1109/ACC.2010.5530866

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/amcc/HerpenOWB10
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/amcc/HerpenOWB10
Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra:
Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. ACC 2010: 3493-3499

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.