"Ultra-fast dual-stage vertical positioning for high performance SPMs."

Andrew J. Fleming, Brian J. Kenton, Kam K. Leang (2010)

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DOI: 10.1109/ACC.2010.5530950

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Andrew J. Fleming, Brian J. Kenton, Kam K. Leang:
Ultra-fast dual-stage vertical positioning for high performance SPMs. ACC 2010: 4975-4980

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