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"Characterization of stress distribution in ultra-thinned DRAM wafer."

Tomoji Nakamura et al. (2015)

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DOI: 10.1109/3DIC.2015.7334558

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Tomoji Nakamura, Yoriko Mizushima, Young-Suk Kim, Ryuichi Sugie, Takayuki Ohba:
Characterization of stress distribution in ultra-thinned DRAM wafer. 3DIC 2015: TS3.2.1-TS3.2.5

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