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"High density Cu-TSVs and reliability issues."

Mariappan Murugesan et al. (2011)

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DOI: 10.1109/3DIC.2012.6262969

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-27

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Mariappan Murugesan, Harufumi Kobayashi, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi:
High density Cu-TSVs and reliability issues. 3DIC 2011: 1-4

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