BibTeX record journals/mj/XiaoYY06

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@article{DBLP:journals/mj/XiaoYY06,
  author       = {Xia Xiao and
                  Xueyi You and
                  Suying Yao},
  title        = {Theoretical study of mechanical properties of multi-layer {ULSI} interconnect
                  dielectrics by surface acoustic wave method},
  journal      = {Microelectron. J.},
  volume       = {37},
  number       = {10},
  pages        = {1052--1055},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.mejo.2006.04.005},
  doi          = {10.1016/J.MEJO.2006.04.005},
  timestamp    = {Sat, 22 Feb 2020 19:34:05 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/XiaoYY06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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