"Theoretical study of mechanical properties of multi-layer ULSI ..."

Xia Xiao, XueYi You, Suying Yao (2006)

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DOI: 10.1016/J.MEJO.2006.04.005

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type: Journal Article

metadata version: 2025-03-13

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Xia Xiao, XueYi You, Suying Yao:
Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method. Microelectron. J. 37(10): 1052-1055 (2006)

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