BibTeX record conf/irps/GriggioPPTSTKLH18

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@inproceedings{DBLP:conf/irps/GriggioPPTSTKLH18,
  author       = {F. Griggio and
                  James Palmer and
                  F. Pan and
                  N. Toledo and
                  Anthony Schmitz and
                  Ilan Tsameret and
                  R. Kasim and
                  Gerald S. Leatherman and
                  Jeffery Hicks and
                  A. Madhavan and
                  J. Shin and
                  J. Steigerwald and
                  A. Yeoh and
                  C. Auth},
  title        = {Reliability of dual-damascene local interconnects featuring cobalt
                  on 10 nm logic technology},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2018, Burlingame,
                  CA, USA, March 11-15, 2018},
  pages        = {6},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/IRPS.2018.8353641},
  doi          = {10.1109/IRPS.2018.8353641},
  timestamp    = {Sat, 25 Sep 2021 18:45:16 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/GriggioPPTSTKLH18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}