BibTeX record conf/essderc/LittaHO13

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@inproceedings{DBLP:conf/essderc/LittaHO13,
  author       = {Eugenio Dentoni Litta and
                  Per{-}Erik Hellstr{\"{o}}m and
                  Mikael {\"{O}}stling},
  title        = {Mobility enhancement by integration of TmSiO {IL} in 0.65nm {EOT}
                  high-k/metal gate MOSFETs},
  booktitle    = {Proceedings of the European Solid-State Device Research Conference,
                  {ESSDERC} 2013, Bucharest, Romania, September 16-20, 2013},
  pages        = {155--158},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/ESSDERC.2013.6818842},
  doi          = {10.1109/ESSDERC.2013.6818842},
  timestamp    = {Sun, 02 Oct 2022 16:00:38 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/LittaHO13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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