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J. P. M. B. Vermeulen

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2010 – 2019

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2019
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S. J. Hermanussen, M. B. I. Habets, Marcel François Heertjes, J. P. M. B. Vermeulen:
Conformal slip-free wafer chucking using an actuated wafer table. ICCMA 2019: 278-282

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