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M. Licbau

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2014
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D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox:
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. ICICDT 2014: 1-4

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