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"ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM."

D. H. Triyoso et al. (2014)

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DOI: 10.1109/ICICDT.2014.6838595

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  - conf/icicdt/TriyosoWSNPUODW14
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  - https://dblp.org/rec/conf/icicdt/TriyosoWSNPUODW14
D. H. Triyoso, Wenke Weinreich, Konrad Seidel, Mark G. Nolan, Patrick Polakowski, D. Utess, Susanne Ohsiek, K. Dittmar, M. Weisheit, M. Licbau, R. Fox:
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM. ICICDT 2014: 1-4

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