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Laurent Henn-Lecordier

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2000 – 2009

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2004
[c2]
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  - conf/amcc/ChooARHC04
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Jae-Ouk Choo, Raymond A. Adomaitis, Gary W. Rubloff, Laurent Henn-Lecordier, Yuhong Cai:
A new approach to spatially controllable CVD. ACC 2004: 287-292
2000
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  - conf/wsc/HerrmannCHMNRS00
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Jeffrey W. Herrmann, Brian F. Conaghan, Laurent Henn-Lecordier, Praveen Mellacheruvu, Manh-Quan Nguyen, Gary W. Rubloff, Rock Z. Shi:
Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment. WSC 2000: 1491-1498

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