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@inproceedings{DBLP:conf/icmens/ARM05,
  author       = {Ibrahim M. W. A and
                  Saunders J. R. and
                  Walied A. Moussa},
  title        = {Hydrogel Microvalve Device Modeling and Simulation},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {221--222},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.56},
  doi          = {10.1109/ICMENS.2005.56},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ARM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AbabnehAE05,
  author       = {A. Ababneh and
                  Alidad Amirfazli and
                  Janet A. W. Elliott},
  title        = {Effect of Gravity on the Macroscopic Advancing Contact Angle: An Experimental
                  Investigation},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {293--294},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.45},
  doi          = {10.1109/ICMENS.2005.45},
  timestamp    = {Fri, 03 May 2024 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icmens/AbabnehAE05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Adamson05,
  author       = {Peep Adamson},
  title        = {Differential Reflection Characteristics for Optical Probing of Nanoscale
                  Anisotropic Layered System},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {307--313},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.42},
  doi          = {10.1109/ICMENS.2005.42},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Adamson05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AlbertaJRH05,
  author       = {F. Alberta and
                  Xiaoning Jiang and
                  Paul Rehrig and
                  Wesley Hackenberger},
  title        = {Actuator Materials for Extreme Environments},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {459},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.2},
  doi          = {10.1109/ICMENS.2005.2},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AlbertaJRH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AllyAR05,
  author       = {J. Ally and
                  Alidad Amirfazli and
                  Wilson H.{-}Y. Roa},
  title        = {Model Studies of Magnetic Particle Retention in the Conducting Airways},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {182--184},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.8},
  doi          = {10.1109/ICMENS.2005.8},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AllyAR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AmerlY05,
  author       = {Peter V. Amerl and
                  Andrew W. Yau},
  title        = {Towards the Miniaturization of a Space-Borne Electrostatic Energy
                  Analyzer: the Miniature Enhanced Geometry Electrostatic Analyzer {(MEGEA)}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {139--143},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.128},
  doi          = {10.1109/ICMENS.2005.128},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AmerlY05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AndronenkoSP05,
  author       = {Sergey Andronenko and
                  Ion Stiharu and
                  Muthukuruman Packirisamy},
  title        = {The Use of Microelectromechanical Systems for Surge Detection in Gas
                  Turbine Engines},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {355--358},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.122},
  doi          = {10.1109/ICMENS.2005.122},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AndronenkoSP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AnisCM05,
  author       = {Yasser H. Anis and
                  William L. Cleghorn and
                  James K. Mills},
  title        = {Modal Analysis of Microgrippers used in Assembly of {MEMS} Devices},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {281--286},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.74},
  doi          = {10.1109/ICMENS.2005.74},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AnisCM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ArshakGCKA05,
  author       = {Khalil Arshak and
                  Stephen F. Gilmartin and
                  Damian Collins and
                  Olga Korostynska and
                  Arous Arshak},
  title        = {Patterning Nanometer Resist Features on Planar and Topography Substrates
                  Using The 2-Step {NERIME} {FIB} Top Surface Imaging Process},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {159--166},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.97},
  doi          = {10.1109/ICMENS.2005.97},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ArshakGCKA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/AyiralaXR05,
  author       = {Subhash C. Ayirala and
                  Wei Xu and
                  Dandina N. Rao},
  title        = {Interfacial Behavior of Complex Hydrocarbon Fluids at Elevated Pressures
                  and Temperatures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {173},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.64},
  doi          = {10.1109/ICMENS.2005.64},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/AyiralaXR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/BadranM05,
  author       = {Mohamed Badran and
                  Medhat Moussa},
  title        = {BioMEMS Implants for neural Regeneration after a Spinal Cord Injury},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {89--90},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.31},
  doi          = {10.1109/ICMENS.2005.31},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/BadranM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/BanKJFK05,
  author       = {Fuqiang Ban and
                  Savariraj Kingsley and
                  Ross Johnson and
                  Hicham Fenniri and
                  Andriy Kovalenko},
  title        = {Modeling the Zinc Chelating Rosette Nanotube},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {379--382},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.76},
  doi          = {10.1109/ICMENS.2005.76},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/BanKJFK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/BenfieldML05,
  author       = {D. Benfield and
                  Walied A. Moussa and
                  Edmond Lou},
  title        = {Verifying Finite Element Simulation for a Piezoresistive {MEMS} Sensor},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {454},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.131},
  doi          = {10.1109/ICMENS.2005.131},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/BenfieldML05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ChangWL05,
  author       = {Pen{-}Lun Chang and
                  Shun{-}Wu Wang and
                  Meng{-}Ju Lin},
  title        = {Deformation Analysis of Tunable Fabry-Perot Structure Caused by Thermal
                  Residual Gradient Stresses},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {61--64},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.38},
  doi          = {10.1109/ICMENS.2005.38},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ChangWL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ChaoLL05,
  author       = {Lu{-}Ping Chao and
                  Chih{-}Wei Lin and
                  Yung{-}Dong Lau},
  title        = {A Study on the Effects of Humidity, Temperature, and Pressure Sensor
                  on the Piezoresistive Film Co-Structure},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {443--447},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.19},
  doi          = {10.1109/ICMENS.2005.19},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ChaoLL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ChenH05,
  author       = {Kun{-}Nan Chen and
                  Jen{-}Ching Huang},
  title        = {Analysis of Tip Effects on the Dynamic Characteristics of V-shaped
                  Atomic Force Microscope Probes},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {65--68},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.26},
  doi          = {10.1109/ICMENS.2005.26},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ChenH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Cheng05,
  author       = {Lun{-}Kai Cheng},
  title        = {High-speed Dense Channel Fiber Bragg Grating Sensor Array For Structural
                  Health Monitoring},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {364--365},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.55},
  doi          = {10.1109/ICMENS.2005.55},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Cheng05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ChowdhuryAM05,
  author       = {Sazzadur Chowdhury and
                  Majid Ahmadi and
                  William C. Miller},
  title        = {A New Method of Electrostatic Force Modeling for {MEMS} Sensors and
                  Actuators},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {431--435},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.16},
  doi          = {10.1109/ICMENS.2005.16},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ChowdhuryAM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Chu05,
  author       = {Philip Chu},
  title        = {Avery Dennison Micro-Nano Replication Capabilities for {MEMS} and
                  Microfluidics},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {27--29},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.29},
  doi          = {10.1109/ICMENS.2005.29},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Chu05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ChungC05,
  author       = {Hsing{-}Yi Chung and
                  Rongshun Chen},
  title        = {Characterization and Analysis of Vertically Comb-driven Micromirrors},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {335--340},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.34},
  doi          = {10.1109/ICMENS.2005.34},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ChungC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ColinetGJ05,
  author       = {{\'{E}}ric Colinet and
                  Dimitri Galayko and
                  J{\'{e}}r{\^{o}}me Juillard},
  title        = {Pulse-actuated micromechanical resonator using digital Kalman observer},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {449--453},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.101},
  doi          = {10.1109/ICMENS.2005.101},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ColinetGJ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/CurrentaYMGSVA05,
  author       = {K. Wayne Current and
                  Kelvin Yuk and
                  Charles McConaghy and
                  Peter R. C. Gascoyne and
                  Jon A. Schwartz and
                  Jody V. Vykoukal and
                  Craig Andrews},
  title        = {A High-Voltage Integrated Circuit Engine for a Dielectrophoresis-based
                  Programmable Micro-Fluidic Processor},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {153--158},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.15},
  doi          = {10.1109/ICMENS.2005.15},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/CurrentaYMGSVA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/CycaSH05,
  author       = {Michael J. Cyca and
                  Swavik A. Spiewak and
                  Ronald J. Hugo},
  title        = {Non-Invasive Mapping of Fluid Temperature and Flow in Microsystems},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {21--26},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.85},
  doi          = {10.1109/ICMENS.2005.85},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/CycaSH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/DaweritzP05,
  author       = {L. D{\"{a}}weritz and
                  K. H. Ploog},
  title        = {Ferromagnetic {III-V} Semiconductor Films with High Transition Temperature},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {42--45},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.51},
  doi          = {10.1109/ICMENS.2005.51},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/DaweritzP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/DolatabadiM05,
  author       = {Ali Dolatabadi and
                  Kamran Mohseni},
  title        = {Behavior of a moving droplet under electrowetting actuation in microchannel},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {95--96},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.30},
  doi          = {10.1109/ICMENS.2005.30},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/DolatabadiM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/DoolK05,
  author       = {T. C. van den Dool and
                  F. Kamphues},
  title        = {The development of a Cryogenic Optical Delay Line for {DARWIN}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {195--196},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.118},
  doi          = {10.1109/ICMENS.2005.118},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/DoolK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/DrabikK05,
  author       = {Piotr Drabik and
                  Andriy Kovalenko},
  title        = {Microtubule Stability Studied by Integral Equation Theory},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {406--407},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.73},
  doi          = {10.1109/ICMENS.2005.73},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/DrabikK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Driel05,
  author       = {Henry M. van Driel},
  title        = {Injecting and controlling spin populations and currents in semiconductors
                  using optically induced quantum interference effects},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {40},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.60},
  doi          = {10.1109/ICMENS.2005.60},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Driel05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/El-DinM05,
  author       = {Mohamed Gamal El{-}Din and
                  Walied A. Moussa},
  title        = {{ANN} Modeling of Micro-Machined Gas Sensor Signals},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {87--88},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.27},
  doi          = {10.1109/ICMENS.2005.27},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/El-DinM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ElataL05,
  author       = {David Elata and
                  Vitaly Leus},
  title        = {Switching time, impact velocity and release response, of voltage and
                  charge driven electrostatic switches},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {331--334},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.116},
  doi          = {10.1109/ICMENS.2005.116},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ElataL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ElyLFR05,
  author       = {Leticia Ely and
                  Raimar L{\"{o}}benberg and
                  Warren H. Finlay and
                  Wilson H.{-}Y. Roa},
  title        = {Optimizing Inhalable Nanoparticles},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {125--126},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.96},
  doi          = {10.1109/ICMENS.2005.96},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ElyLFR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/FalcoSR05,
  author       = {Charles M. Falco and
                  Justin M. Shaw and
                  Timothy M. Reith},
  title        = {Spinwaves in Spintronics Structures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {41},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.111},
  doi          = {10.1109/ICMENS.2005.111},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/FalcoSR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/FengCPD05,
  author       = {Ji Feng and
                  Zuo Chuncheng and
                  Zhang Peng and
                  Zhou Deyi},
  title        = {Optimization of Turn Geometries in Microfluidic Channels},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {32--38},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.95},
  doi          = {10.1109/ICMENS.2005.95},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/FengCPD05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/FengCPD05a,
  author       = {Ji Feng and
                  Zuo Chuncheng and
                  Zhang Peng and
                  Zhou Deyi},
  title        = {Analysis of Electroosmotic Flow with Linear Variable Zeta Potential},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {319--326},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.25},
  doi          = {10.1109/ICMENS.2005.25},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/FengCPD05a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/FerrarisMS05,
  author       = {Eleonora Ferraris and
                  Irene Fassi and
                  Biagio De Masi and
                  Marco Del Sarto},
  title        = {Polysilicon Fatigue Test-Bed Monitoring Based on the 2nd Harmonic
                  of the Device Current Measurement},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {55--60},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.99},
  doi          = {10.1109/ICMENS.2005.99},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/FerrarisMS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/FouldsP05,
  author       = {Ian G. Foulds and
                  M. Parameswaran},
  title        = {Hysteresis Spring Single Digital Input Bistable Mechanism},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {455--458},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.5},
  doi          = {10.1109/ICMENS.2005.5},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/FouldsP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Gardner05,
  author       = {Phyllis Gardner},
  title        = {Microfabricated Silicon NanoPORE Membranes Provide Continuous Delivery
                  of Biopharmaceuticals},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {179},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.70},
  doi          = {10.1109/ICMENS.2005.70},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Gardner05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Gaydos05,
  author       = {J. Gaydos},
  title        = {A Disjoining Pressure Isotherm for Curved, Interfacial Boundaries},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {16},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.14},
  doi          = {10.1109/ICMENS.2005.14},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Gaydos05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Gaydos05a,
  author       = {J. Gaydos},
  title        = {Non-Linear Elastic Deformations of Multi-Phase Fluid Systems},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {97},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.86},
  doi          = {10.1109/ICMENS.2005.86},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Gaydos05a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/George05,
  author       = {J.{-}M. George},
  title        = {Spin polarized transport effects in {III-V} semiconductor heterostructures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {39},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.109},
  doi          = {10.1109/ICMENS.2005.109},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/George05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GhallabB05,
  author       = {Yehya H. Ghallab and
                  Wael M. Badawy},
  title        = {Techniques For Biocells Sensing, Detection And Characterization},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {402--405},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.117},
  doi          = {10.1109/ICMENS.2005.117},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GhallabB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GhoussoubG05,
  author       = {Nassif Ghoussoub and
                  Yujin Guo},
  title        = {Dynamic Deflection of Electrostatic {MEMS}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {341--345},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.43},
  doi          = {10.1109/ICMENS.2005.43},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GhoussoubG05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GrandaKKBK05,
  author       = {Willy Valdivia Granda and
                  Chistine D. Keating and
                  Maricel G. Kann and
                  Roderic Beresford and
                  Shana O. Kelley},
  title        = {Detection of Encephalic and Hemorrhagic Viruses: Integration of Micro
                  and Nano-fabrication with Computational Tools},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {411--417},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.40},
  doi          = {10.1109/ICMENS.2005.40},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GrandaKKBK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GrundkeDPBSWRMPPV05,
  author       = {Karina Grundke and
                  Astrid Drechsler and
                  Nicole Petong and
                  Cornelia Bellmann and
                  Manfred Stamm and
                  Odo Wunnicke and
                  Jens Reichelt and
                  Iris M{\"{a}}ge and
                  B. Pinter and
                  T. Pearce and
                  M. Voigt},
  title        = {On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern
                  Collapse in High Aspect Ratio Patterning of Photoresists},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {14--15},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.93},
  doi          = {10.1109/ICMENS.2005.93},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GrundkeDPBSWRMPPV05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GungormusXTPS05,
  author       = {Mustafa Gungormus and
                  Xiaorong Xiong and
                  Candan Tamler and
                  Babak A. Parviz and
                  Mehmet Sarikaya},
  title        = {Genetically Engineered Polypeptide for Differential Recognition of
                  Platinum on Microfabricated Structures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {167--171},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.54},
  doi          = {10.1109/ICMENS.2005.54},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/GungormusXTPS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/GusarovaZK05,
  author       = {Sergey Gusarova and
                  Tom Ziegler and
                  A. Kovalenko},
  title        = {Self-Consistent Combination of the Three-Dimensional {RISM} Theory
                  of Molecular Solvation with Analytical Gradients and the Amsterdam
                  Density Functional Package},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {207--208},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.108},
  doi          = {10.1109/ICMENS.2005.108},
  timestamp    = {Thu, 27 Jul 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icmens/GusarovaZK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/HalswijkMS05,
  author       = {W. H. C. Halswijk and
                  Jean{-}Luc P. A. Moerel and
                  H. M. Sanders},
  title        = {Thermal Design of an {HTP} Microthruster},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {143--144},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.124},
  doi          = {10.1109/ICMENS.2005.124},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/HalswijkMS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/HamannVB05,
  author       = {R. J. Hamann and
                  Chris J. M. Verhoeven and
                  A. R. Bonnema},
  title        = {Nano-satellites, a fast way to pre-qualify new micro-technology},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {263--264},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.80},
  doi          = {10.1109/ICMENS.2005.80},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/HamannVB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/HanMM05,
  author       = {Yong Han and
                  Arun K. Misra and
                  Dan Mateescu},
  title        = {A method for crack detection in structures using piezoelectric sensors
                  and actuators},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {353--354},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.1},
  doi          = {10.1109/ICMENS.2005.1},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/HanMM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/HasegawaK05,
  author       = {Hideki Hasegawa and
                  Seiya Kasai},
  title        = {{III-V} Compound Semiconductor Nanotechnology for Smart Systems},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {399},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.57},
  doi          = {10.1109/ICMENS.2005.57},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/HasegawaK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Hirata05,
  author       = {Fumio Hirata},
  title        = {New Methodologies in Computational Nanoscience Facilitated by the
                  {GRID} Computing Environment},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {121},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.81},
  doi          = {10.1109/ICMENS.2005.81},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Hirata05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Jiang05,
  author       = {Xin Jiang},
  title        = {Efficient Spin Injection using Tunnel Injectors},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {8},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.46},
  doi          = {10.1109/ICMENS.2005.46},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Jiang05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Jongkind05,
  author       = {W. Jongkind},
  title        = {The Dutch {MST} Program MicroNed and its Cluster {MISAT}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {261--262},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.9},
  doi          = {10.1109/ICMENS.2005.9},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Jongkind05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/KasimKD05,
  author       = {Rahim Kasim and
                  Bruce C. Kim and
                  Josef Drobnik},
  title        = {Advanced Mems for High Power Integrated Distribution Systems},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {247--254},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.21},
  doi          = {10.1109/ICMENS.2005.21},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/KasimKD05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Kaur05,
  author       = {Kamaljit Kaur},
  title        = {Dynamic effects on Peptide Structure: Molecular dynamics simulations
                  of a peptide employing ensemble of peptides},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {172},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.44},
  doi          = {10.1109/ICMENS.2005.44},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Kaur05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/KayaNM05,
  author       = {Koji Kaya and
                  Atsushi Nakajima and
                  Masaaki Mitsui},
  title        = {New World in Soft-Nano-Materials},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {231},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.83},
  doi          = {10.1109/ICMENS.2005.83},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/KayaNM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Kovalenko05,
  author       = {Andriy Kovalenko},
  title        = {Microscopic Theory of Liquid Interfaces in Molecular Systems},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {209--213},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.72},
  doi          = {10.1109/ICMENS.2005.72},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Kovalenko05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/KruzeleckyZWHJZP05,
  author       = {Roman V. Kruzelecky and
                  Jing Zou and
                  Brian Wong and
                  Emile Haddad and
                  Wes Jamroz and
                  Wanping Zheng and
                  Linh Ngo Phong},
  title        = {Advanced Microphotonic and {MEMS} Technologies for the {MEOS} Microsatellite
                  Earth Observation Mission},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {255--260},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.22},
  doi          = {10.1109/ICMENS.2005.22},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/KruzeleckyZWHJZP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LeijtensBH05,
  author       = {Johan Leijtens and
                  Kees de Boom and
                  Nico van der Heiden},
  title        = {Micro Systems Technology: the way to shrink sunsensors},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {193--194},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.68},
  doi          = {10.1109/ICMENS.2005.68},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LeijtensBH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LeijtensCL05,
  author       = {Johan Leijtens and
                  Andrew Court and
                  Jan Willem Lucas},
  title        = {The Smallsat {TIR} Spectrometer {MIBS}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {137--138},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.121},
  doi          = {10.1109/ICMENS.2005.121},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LeijtensCL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LiA05,
  author       = {W. Li and
                  Alidad Amirfazli},
  title        = {Superhydrophobic Behavior of a Microtextured Surface: {A} Thermodynamic
                  Approach},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {49},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.114},
  doi          = {10.1109/ICMENS.2005.114},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LiA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LiaoCC05,
  author       = {Ke{-}Min Liao and
                  Rongshun Chen and
                  Bruce C. S. Chou},
  title        = {Design of a Thermal-Bubble-Based Micromachined Accelerometer},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {438--442},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.133},
  doi          = {10.1109/ICMENS.2005.133},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LiaoCC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LivadaruK05,
  author       = {Lucian Livadaru and
                  Andriy Kovalenko},
  title        = {A Self-Consistent Theory of Polymer Solvation},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {400--401},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.18},
  doi          = {10.1109/ICMENS.2005.18},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LivadaruK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LuC05,
  author       = {Hung{-}Ching Lu and
                  Chih{-}Ying Chuang},
  title        = {The Implementation of Fuzzy-Based Path Planning for Car-Like Mobile
                  Robot},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {467--472},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.119},
  doi          = {10.1109/ICMENS.2005.119},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LuC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/LuekeQMC05,
  author       = {Jonathan Lueke and
                  Noor Al Quddus and
                  Walied A. Moussa and
                  Aman Chahal},
  title        = {A Parametric Study of Thermal Effects on the Reliability of {RF} {MEMS}
                  Switches},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {30--31},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.17},
  doi          = {10.1109/ICMENS.2005.17},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/LuekeQMC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MaKA05,
  author       = {Zhen Ma and
                  David M. Klymyshyn and
                  Sven Achenbach},
  title        = {{LIGA} Cavity Resonator for K-Band Applications},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {106--109},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.65},
  doi          = {10.1109/ICMENS.2005.65},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MaKA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Mansour05,
  author       = {Raafat R. Mansour},
  title        = {{RF} Mems for Space Applications},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {191--192},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.104},
  doi          = {10.1109/ICMENS.2005.104},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Mansour05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MansouriSBKK05,
  author       = {Ali Mansouri and
                  Carl Scheuerman and
                  Subir Bhattacharjee and
                  Daniel Y. Kwok and
                  Larry W. Kostiuk},
  title        = {Transient behaviour of streaming potential development in microfluidic
                  channels},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {228},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.129},
  doi          = {10.1109/ICMENS.2005.129},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MansouriSBKK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MartinFBV05,
  author       = {Andrew R. Martin and
                  Warren H. Finlay and
                  Michael J. Brett and
                  Doug Vick},
  title        = {Generation and Recovery of Sub-Micron Diameter Fibrous Aerosols},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {180--181},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.4},
  doi          = {10.1109/ICMENS.2005.4},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MartinFBV05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MassadSED05,
  author       = {Jordan E. Massad and
                  Hartono Sumali and
                  David S. Epp and
                  Christopher W. Dyck},
  title        = {Modeling, Simulation, and Testing of the Mechanical Dynamics of an
                  {RF} {MEMS} Switch},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {237--240},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.77},
  doi          = {10.1109/ICMENS.2005.77},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MassadSED05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MatsuzakiS05,
  author       = {Yoshitaka Matsuzaki and
                  Toshihiko Sugiura},
  title        = {Large Deflection of a Polyurethane Elastomer under High Electric Field},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {91--92},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.6},
  doi          = {10.1109/ICMENS.2005.6},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MatsuzakiS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Meyyappan05,
  author       = {M. Meyyappan},
  title        = {Novel One Dimensional Nanostructures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {3},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.91},
  doi          = {10.1109/ICMENS.2005.91},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Meyyappan05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MizunoFDGISSIS05,
  author       = {Jun Mizuno and
                  Sharon Farrens and
                  Viorel Dragoi and
                  Thomas Glinsner and
                  Hiroyuki Ishida and
                  Hidetoshi Shinohara and
                  Takafumi Suzuki and
                  Masanori Ishizuka and
                  Shuichi Shoji},
  title        = {Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation
                  Bonding},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {346--352},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.37},
  doi          = {10.1109/ICMENS.2005.37},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MizunoFDGISSIS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MohammedM05,
  author       = {Ahmed A. S. Mohammed and
                  Walied A. Moussa},
  title        = {Design and Simulation of One-Port Resonant- Piezoresistive Strain
                  Sensor},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {103--105},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.39},
  doi          = {10.1109/ICMENS.2005.39},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MohammedM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MorrisHP05,
  author       = {Christopher J. Morris and
                  Harvey Ho and
                  Babak A. Parviz},
  title        = {Using Insolubility Wave-Front for Polymer Deposition on Self-Assembling
                  Microfabricated Parts},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {223--227},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.130},
  doi          = {10.1109/ICMENS.2005.130},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MorrisHP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MostowfiCMMB05,
  author       = {Farshid Mostowfi and
                  Jan Czarnecki and
                  Elizeusz Musial and
                  Jacob Masliyah and
                  Subir Bhattacharjee},
  title        = {Thin film breakup by electric fields: Development of microfluidic
                  applications in de-emulsification},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {98},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.126},
  doi          = {10.1109/ICMENS.2005.126},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MostowfiCMMB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/MradX05,
  author       = {Nezih Mrad and
                  Gaozhi Xiao},
  title        = {Multiplexed Fiber Bragg Gratings For Potential Aerospace Applications},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {359--363},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.79},
  doi          = {10.1109/ICMENS.2005.79},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/MradX05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/NazemifardMB05,
  author       = {Neda Nazemifard and
                  Jacob Masliyah and
                  Subir Bhattacharjee},
  title        = {Role of Patterned Surface Charge Heterogeneity on Particle Deposition},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {52},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.106},
  doi          = {10.1109/ICMENS.2005.106},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/NazemifardMB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/OlsonBSNTB05,
  author       = {C. R. Olson and
                  T. Balasubramaniam and
                  Jeff Shrum and
                  T. Nord and
                  P. L. Taylor and
                  Robert E. Burrell},
  title        = {Novel Antimicrobial Activity of Nanocrystalline Silver Dressings},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {129--134},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.90},
  doi          = {10.1109/ICMENS.2005.90},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/OlsonBSNTB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ParkEKKKL05,
  author       = {Hyoung{-}Jin Park and
                  Duk{-}Soo Eun and
                  Dae{-}Young Kong and
                  Seong{-}Jin Kong and
                  Seong{-}Ho Kong and
                  Jong{-}Hyun Lee},
  title        = {Fabrication of The Multi-PCR Chamber With Inner Heat-Sink Materials
                  Using a Micro-Blaster Etching Technique},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {301--306},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.49},
  doi          = {10.1109/ICMENS.2005.49},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ParkEKKKL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/PatrascuS05,
  author       = {Mihai P{u{a}}tra{c{s}}cu and
                  Stefano Stramigioli},
  title        = {Stick-slip Actuation of Electrostatic Stepper Micropositioners for
                  Data Storage - the {\(\mathrm{\mu}\)}Walker},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {81--86},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.112},
  doi          = {10.1109/ICMENS.2005.112},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/PatrascuS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/PattnaikVSS05,
  author       = {Prasant Kumar Pattnaik and
                  Bh. Vijayaaditya and
                  T. Srinivas and
                  A. Selvarajan},
  title        = {Optical {MEMS} pressure sensor using ring resonator on a circular
                  diaphragm},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {277--280},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.94},
  doi          = {10.1109/ICMENS.2005.94},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/PattnaikVSS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/PayneGPPZ05,
  author       = {William F. Payne and
                  J. V. Gore and
                  Timothy D. Pope and
                  Linh Ngo Phong and
                  Wanping Zheng},
  title        = {Microbolometer Instrument Payload Design for a Microsatellite Mission},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {265--273},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.69},
  doi          = {10.1109/ICMENS.2005.69},
  timestamp    = {Fri, 14 Jul 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icmens/PayneGPPZ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Pelesko05,
  author       = {John A. Pelesko},
  title        = {Self Assembly - Promises and Challenges},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {427--428},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.107},
  doi          = {10.1109/ICMENS.2005.107},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Pelesko05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/PhongLZPAEJ05,
  author       = {L. Ngo Phong and
                  J. Lee and
                  W. Zheng and
                  Timothy D. Pope and
                  Christine Alain and
                  S. Elias and
                  Hubert Jerominek},
  title        = {Next Generation Microbolometers for High Resolution Remote Sensing},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {197--198},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.84},
  doi          = {10.1109/ICMENS.2005.84},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/PhongLZPAEJ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/PopeANJPZ05,
  author       = {Timothy D. Pope and
                  Christine Alain and
                  Lo{\"{\i}}c Le Noc and
                  Hubert Jerominek and
                  L. Ngo Phong and
                  W. Zheng},
  title        = {Performance of a 512x3 Pixel Microbolometer Detector for Space Imaging
                  Applications},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {275--276},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.98},
  doi          = {10.1109/ICMENS.2005.98},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/PopeANJPZ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/QuddusBM05,
  author       = {Noor Al Quddus and
                  Subir Bhattacharjee and
                  Walied A. Moussa},
  title        = {Electrokinetic Flow in a Wavy Channel},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {219--220},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.47},
  doi          = {10.1109/ICMENS.2005.47},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/QuddusBM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Ramon-TorregrosaRC05,
  author       = {P. J. Ram{\'{o}}n{-}Torregrosa and
                  Miguel {\'{A}}ngel Rodr{\'{\i}}guez{-}Valverde and
                  Miguel Angel Cabrerizo{-}V{\'{\i}}lchez},
  title        = {New Trends in Rough Surface Characterization: When the Wrinkle is
                  Beautiful},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {47--48},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.82},
  doi          = {10.1109/ICMENS.2005.82},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Ramon-TorregrosaRC05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/RaoA05,
  author       = {Dandina N. Rao and
                  Subhash C. Ayirala},
  title        = {Influence of Solid-Liquid-Liquid Interactions on Multiphase Transport
                  Behavior in Porous Media},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {17--18},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.59},
  doi          = {10.1109/ICMENS.2005.59},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/RaoA05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Rebeiz05,
  author       = {Gabriel M. Rebeiz},
  title        = {{RF} {MEMS} for Low Power Wireless Communications},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {327},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.103},
  doi          = {10.1109/ICMENS.2005.103},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Rebeiz05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SadekM05,
  author       = {Khaled Sadek and
                  Walied A. Moussa},
  title        = {{MEMS} Design for Fabrication},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {110--112},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.67},
  doi          = {10.1109/ICMENS.2005.67},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SadekM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SamsonAKWOB05,
  author       = {Scott Samson and
                  Rahul Agarwal and
                  Sunny Kedia and
                  Weidong Wang and
                  Shinzo Onishi and
                  John Bumgarner},
  title        = {Fabrication Processes for Packaged Optical {MEMS} Devices},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {113--120},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.50},
  doi          = {10.1109/ICMENS.2005.50},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SamsonAKWOB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SeginMB05,
  author       = {Tetyana Segin and
                  Jacob Masliyah and
                  Subir Bhattacharjee},
  title        = {Molecular Dynamics Simulation of the Rupture of Nanometer-Sized Oil/Water
                  Interface},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {295},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.78},
  doi          = {10.1109/ICMENS.2005.78},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SeginMB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ShafaiSACS05,
  author       = {Cyrus Shafai and
                  Lotfollah Shafai and
                  Reena Al{-}Dahleh and
                  Dwayne D. Chrusch and
                  Satish K. Sharma},
  title        = {Reconfigurable Ground Plane Membranes for Analog/Digital Microstrip
                  Phase Shifters and Frequency Agile Antenna},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {287--290},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.102},
  doi          = {10.1109/ICMENS.2005.102},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ShafaiSACS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ShiariMK05,
  author       = {Behrouz Shiari and
                  Ronald E. Miller and
                  Dennis D. Klug},
  title        = {Finite Temperature Multiscale Computational Modeling of Materials
                  at Nanoscale},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {201--206},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.52},
  doi          = {10.1109/ICMENS.2005.52},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ShiariMK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ShrumTCMB05,
  author       = {Jeff Shrum and
                  P. L. Taylor and
                  Nicole Christensen and
                  William C. McCaffrey and
                  Robert E. Burrell},
  title        = {Towards a Mechanism for Nanocrystalline Silver Efficacy in the Wound
                  Environment: Structure Versus Size},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {185--189},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.127},
  doi          = {10.1109/ICMENS.2005.127},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ShrumTCMB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SinhaY05,
  author       = {Niraj Sinha and
                  John T. W. Yeow},
  title        = {Modeling of the Behavior of Random Carbon Nanotubes During Field Emission},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {371--376},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.75},
  doi          = {10.1109/ICMENS.2005.75},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SinhaY05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Sivarao05,
  author       = {P. S. Sivarao},
  title        = {Expert System Suitability in Modeling and Analysis of Tool Wear in
                  Drilling},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {473--476},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.48},
  doi          = {10.1109/ICMENS.2005.48},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Sivarao05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Spiewak05,
  author       = {Swavik A. Spiewak},
  title        = {Versatile Inertial Displacement Sensor for Planar Motion},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {463--466},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.132},
  doi          = {10.1109/ICMENS.2005.132},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Spiewak05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/StarraRCCF05,
  author       = {Michael J. Starra and
                  E. David Reedy and
                  Alex D. Corwina and
                  Robert W. Carpick and
                  Erin E. Flater},
  title        = {Contact Mechanics Description of Inelastic Displacement Response of
                  a Nano-Positioning Device},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {421--420},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.3},
  doi          = {10.1109/ICMENS.2005.3},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/StarraRCCF05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/StauthP05,
  author       = {Sean A. Stauth and
                  Babak A. Parviz},
  title        = {Integration of Silicon Circuit Components Onto Plastic substrates
                  Using Fluidic Self-Assembly},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {147--152},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.63},
  doi          = {10.1109/ICMENS.2005.63},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/StauthP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Sun05,
  author       = {Jonathan Z. Sun},
  title        = {Spin-transfer Induced Switching in Magnetic Nanopillars},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {9},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.110},
  doi          = {10.1109/ICMENS.2005.110},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Sun05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SunZ05,
  author       = {Bohua Sun and
                  Rui Zhang},
  title        = {{MEMS} Accelerometer With Two Thin Film Piezoelectric Read-Out},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {318},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.66},
  doi          = {10.1109/ICMENS.2005.66},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SunZ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/SupeeneKB05,
  author       = {Graeme Supeene and
                  Charles Robert Koch and
                  Subir Bhattacharjee},
  title        = {Numerically Modeled Dynamic Response of Perfect and Leaky Dielectric
                  Droplets in an Electric Field},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {99},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.92},
  doi          = {10.1109/ICMENS.2005.92},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/SupeeneKB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/TakamatsuS05,
  author       = {Hikaru Takamatsu and
                  Toshihiko Sugiura},
  title        = {Nonlinear Vibration of Electrostatic {MEMS} under {DC} and {AC} Applied
                  Voltage},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {423--424},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.89},
  doi          = {10.1109/ICMENS.2005.89},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/TakamatsuS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Tanaka05,
  author       = {Masaaki Tanaka},
  title        = {Injecting and controlling spin populations and currents in semiconductors
                  using optically induced quantum interference effects},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {10},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.61},
  doi          = {10.1109/ICMENS.2005.61},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Tanaka05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/UnderhillM05,
  author       = {Royale S. Underhill and
                  Brian W. Michalchuk},
  title        = {Carbon Nanotube Elastomer Composites for use in Dielectric Polymer
                  Actuators},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {369--370},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.32},
  doi          = {10.1109/ICMENS.2005.32},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/UnderhillM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/VasquezP05,
  author       = {P. A. Vasquez and
                  John A. Pelesko},
  title        = {A Variational Approach to Microneedle Design},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {383--386},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.20},
  doi          = {10.1109/ICMENS.2005.20},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/VasquezP05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/VosV05,
  author       = {Lieve De Vos and
                  Nico Van Vooren},
  title        = {Development of miniature visual monitoring cameras at {OIP}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {135--136},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.41},
  doi          = {10.1109/ICMENS.2005.41},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/VosV05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/WilbanksS05,
  author       = {Thor M. Wilbanks and
                  Jeffrey A. Schuster},
  title        = {Aerosol Drug Delivery to the Lung Periphery Using Nano-scale Technologies},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {127--128},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.23},
  doi          = {10.1109/ICMENS.2005.23},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/WilbanksS05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/WuZRL05,
  author       = {Xiao{-}Ming Wu and
                  Ning{-}xin Zhang and
                  Tianling Ren and
                  Litian Liu},
  title        = {Nondestructive Evaluation of {MEMS} Devices by Laser Confocal Measurements},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {69--76},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.87},
  doi          = {10.1109/ICMENS.2005.87},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/WuZRL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/X05,
  title        = {Title Page},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.13},
  doi          = {10.1109/ICMENS.2005.13},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/X05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/X05a,
  title        = {Copyright},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.10},
  doi          = {10.1109/ICMENS.2005.10},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/X05a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/X05b,
  title        = {Preface},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.100},
  doi          = {10.1109/ICMENS.2005.100},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/X05b.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/X05c,
  title        = {Conference Committee},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.36},
  doi          = {10.1109/ICMENS.2005.36},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/X05c.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/XiaT05,
  author       = {Ming Xia and
                  Yiliu Tu},
  title        = {An Investigation of Femtosecond Laser Micromachining},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {296--300},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.24},
  doi          = {10.1109/ICMENS.2005.24},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/XiaT05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/XuAR05,
  author       = {Wei Xu and
                  Subhash C. Ayirala and
                  Dandina N. Rao},
  title        = {Compositional Dependence of Wetting and Contact Angles in Solid-Liquid-Liquid
                  Systems under Realistic Environments},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {50},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.35},
  doi          = {10.1109/ICMENS.2005.35},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/XuAR05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/YamazakiK05,
  author       = {Takeshi Yamazaki and
                  Andriy Kovalenko},
  title        = {Theoretical Study of Pressure and Cosolvent Effects on the Solvation
                  Structure of Staphylococcal Nuclease},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {214--215},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.123},
  doi          = {10.1109/ICMENS.2005.123},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/YamazakiK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Yokoyama05,
  author       = {Hiroshi Yokoyama},
  title        = {Impact of Nanotechnology in Flat Panel Display Industry},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {77},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.58},
  doi          = {10.1109/ICMENS.2005.58},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Yokoyama05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/YoonRM05,
  author       = {J. Yoon and
                  Chongqing Ru and
                  Andrew Mioduchowski},
  title        = {Flow-induced Vibration and Instability of Carbon Nanotubes},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {377--378},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.53},
  doi          = {10.1109/ICMENS.2005.53},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/YoonRM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZaitsevASB05,
  author       = {Stav Zaitsev and
                  Ronen Almog and
                  Oleg Shtempluck and
                  Eyal Buks},
  title        = {Nonlinear Dynamics in Nanomechanical Oscillators},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {387--391},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.88},
  doi          = {10.1109/ICMENS.2005.88},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZaitsevASB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Zhang05,
  author       = {Shoucheng Zhang},
  title        = {The Intrinsic Spin Hall Effect},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {7},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.120},
  doi          = {10.1109/ICMENS.2005.120},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Zhang05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhangBH05,
  author       = {Fengyan Zhang and
                  Robert Barrowcliff and
                  Sheng Teng Hsu},
  title        = {Thermal Stability of IrO2 Nanowires},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {418--420},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.125},
  doi          = {10.1109/ICMENS.2005.125},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhangBH05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhangHALG05,
  author       = {Min Zhang and
                  Franz{-}Josef Hormes and
                  Pratul K. Ajmeraa and
                  Kun Lian and
                  Jost Goettert},
  title        = {Superparamagnetic Particle Embedded Microprobe {(SPEM)} for {GMR}
                  Sensor Sensitivity Calibration},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {175--178},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.115},
  doi          = {10.1109/ICMENS.2005.115},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhangHALG05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhangHL05,
  author       = {Yujun Zhang and
                  Yu{-}dong Huang and
                  Fengfu Li},
  title        = {Study on the Preparation and Electro-deformation of {EVOH-SO3K} {IPMC}},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {313--317},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.113},
  doi          = {10.1109/ICMENS.2005.113},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhangHL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhangJ05,
  author       = {P. Zhang and
                  Graham A. Jullien},
  title        = {Microneedle Arrays for Drug Delivery and Fluid Extraction},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {392--396},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.71},
  doi          = {10.1109/ICMENS.2005.71},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhangJ05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhangK05,
  author       = {Bowei Zhang and
                  Mojtaba Kahrizi},
  title        = {Characteristics of fiber Bragg grating temperature sensor at elevated
                  temperatures},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {241--246},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.33},
  doi          = {10.1109/ICMENS.2005.33},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhangK05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZhouL05,
  author       = {Tiansheng Zhou and
                  Yan Loke},
  title        = {{MEMS} Relays/Switches},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {235--236},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.7},
  doi          = {10.1109/ICMENS.2005.7},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZhouL05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/ZimmelsF05,
  author       = {Y. Zimmels and
                  Leonid G. Fel},
  title        = {Instability of Submicron Anisotropic Liquid Cylinders and Jets in
                  Magnetic Field},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {13},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.62},
  doi          = {10.1109/ICMENS.2005.62},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/ZimmelsF05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/icmens/Zine-El-AbidineOM05,
  author       = {Imed Zine{-}El{-}Abidine and
                  Michal M. Okoniewski and
                  John G. McRory},
  title        = {{RF} {MEMS} Tunable Inductor Using Bimorph Microactuators},
  booktitle    = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  pages        = {436--437},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICMENS.2005.105},
  doi          = {10.1109/ICMENS.2005.105},
  timestamp    = {Fri, 24 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/Zine-El-AbidineOM05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/icmens/2005,
  title        = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2005), 24-27 July 2005, Banff, Alberta, Canada},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://ieeexplore.ieee.org/xpl/conhome/10339/proceeding},
  isbn         = {0-7695-2398-6},
  timestamp    = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/icmens/2005.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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