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@inproceedings{DBLP:conf/nems/ArcamoneSVUABBBP09,
author = {Julien Arcamone and
Marc Sansa and
Jaume Verd and
Arantxa Uranga and
Gabriel Abadal and
N{\'{u}}ria Barniol and
Marc A. F. van den Boogaart and
Juergen Brugger and
Francesc P{\'{e}}rez{-}Murano},
title = {Nanomechanical mass sensor for monitoring deposition rates through
confined apertures},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {94--97},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068534},
doi = {10.1109/NEMS.2009.5068534},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ArcamoneSVUABBBP09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaiTWZX09,
author = {Guanghui Bai and
Wei Teng and
Xianggang Wang and
Hui Zhang and
Peng Xu},
title = {Kinetic and processing studies on a novel technology of producing
high purity nano-silicon dioxide from an alumina rich coal fly ash
with carbon dioxide},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {837--842},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068706},
doi = {10.1109/NEMS.2009.5068706},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/BaiTWZX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CaoZZHWGT09,
author = {Zhong Cao and
Meng{-}Xue Zeng and
Ling Zhang and
Xi{-}Xi Huang and
Ming{-}Xing Wang and
Fu{-}Chun Gong and
Shu{-}Zhen Tan},
title = {Novel optical nanobiosensor assembled with silver nanoparticles on
gold surface},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {987--990},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068739},
doi = {10.1109/NEMS.2009.5068739},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CaoZZHWGT09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCRNLW09,
author = {T. W. Chang and
T. J. Chung and
T. Ru and
Tzer{-}En Nee and
H. C. Lu and
G. M. Wu},
title = {Investigation of InGaN/GaN multiple quantum wells with strain relief
behavior for light-emitting diodes},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {485--488},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068624},
doi = {10.1109/NEMS.2009.5068624},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChangCRNLW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheXSTCY09,
author = {Zhigang Che and
Liangcai Xiong and
Tielin Shi and
Zirong Tang and
Huayang Cheng and
Likun Yang},
title = {Numerical and experimental study of Microscale Laser Shock Processing
using excimer laser},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {265--269},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068574},
doi = {10.1109/NEMS.2009.5068574},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CheXSTCY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCLWL09,
author = {Tao Chen and
Liguo Chen and
Baixu Liu and
Jiachou Wang and
Xinxin Li},
title = {Design of a four-arm structure {MEMS} gripper integrated with sidewall
force sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {75--79},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068530},
doi = {10.1109/NEMS.2009.5068530},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenCLWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCZ09,
author = {X. Chen and
D. F. Cui and
L. L. Zhang},
title = {Design and fabrication of microfluidic chip with micro/nano structures},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {98--101},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068535},
doi = {10.1109/NEMS.2009.5068535},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenCZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCZLZ09,
author = {Weiping Chen and
Xiaoliang Chen and
Guoguang Zheng and
Xiaowei Liu and
Haifeng Zhang},
title = {Analysis of the self-test characteristics of a micromachined accelerometer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {396--399},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068603},
doi = {10.1109/NEMS.2009.5068603},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenCZLZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenDZZ09,
author = {Kenle Chen and
Yueyang Dai and
Xudong Zou and
Jinwen Zhang},
title = {A low-loss {RF} {MEMS} switch with dielectric layer on the lower surface
of the bridge},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {152--155},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068547},
doi = {10.1109/NEMS.2009.5068547},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenDZZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenGG09,
author = {Jie Chen and
Tao Guo and
Hang Guo},
title = {Electron mobility in enhanced N-type silicon nanowire {MOSFET}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1112--1116},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068768},
doi = {10.1109/NEMS.2009.5068768},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenGG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenGG09a,
author = {Jie Chen and
Tao Guo and
Hang Guo},
title = {Analysis of high frequency breakdown of noble gases in {A} MEMS-based
Rb-87 lamp for miniaturized passive rubidium atomic clock},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1117--1119},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068769},
doi = {10.1109/NEMS.2009.5068769},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenGG09a.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenK09,
author = {Kuan{-}Yu Chen and
Ju{-}Nan Kuo},
title = {Diffraction angle prediction of surface micromachined planar curved
grating and crossed grating},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {363--366},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068596},
doi = {10.1109/NEMS.2009.5068596},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLFYZ09,
author = {Yue Chen and
Xiuhan Li and
Dong{-}Ming Fang and
Quan Yuan and
Haixia Zhang},
title = {Spiral capacitor based on copper electroplating},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {432--435},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068612},
doi = {10.1109/NEMS.2009.5068612},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenLFYZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenWSWL09,
author = {Deyong Chen and
Zhengwei Wu and
Xiaojing Shi and
Junbo Wang and
Lei Liu},
title = {Design and modeling of an electromagnetically excited silicon nitride
beam resonant pressure sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {754--757},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068688},
doi = {10.1109/NEMS.2009.5068688},
timestamp = {Mon, 23 Oct 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/ChenWSWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenZWL09,
author = {Zhen Chen and
Yu Zhao and
Wei Wang and
Zhihong Li},
title = {Microfluidic patterning of nanoparticle monolayer: Mechanism analysis
and noncontinuously patterning approach},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {818--821},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068702},
doi = {10.1109/NEMS.2009.5068702},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChenZWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengDKWY09,
author = {Guanggui Cheng and
Jianning Ding and
Biao Kan and
Junziong Wang and
Ningyi Yuan},
title = {Study on the electrical contact property at the interface of the NiCr/TiW
films},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {376--379},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068599},
doi = {10.1109/NEMS.2009.5068599},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChengDKWY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengYW09,
author = {Haitao Cheng and
Heng Yang and
Yuelin Wang},
title = {Fabrication of nanobeam using Focused ion beam {(FIB)} and {KOH} etching},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {139--142},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068544},
doi = {10.1109/NEMS.2009.5068544},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChengYW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuWYHL09,
author = {Hsiao{-}Yeh Chu and
Ming{-}Hang Weng and
Ru{-}Yuan Yang and
Chien{-}Wei Huang and
Chia{-}Hsing Li},
title = {Effect of Al thickness on the Al induced low temperature poly-si film
crystallization process},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {641--644},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068662},
doi = {10.1109/NEMS.2009.5068662},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChuWYHL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChunagCHHHW09,
author = {Cheng{-}Hsin Chuang and
Yu{-}Chi Chen and
You{-}Ming Hsu and
Huei{-}Sheng Huang and
Fei{-}Bin Hsiao and
Chin{-}Hung Wang},
title = {A {DEP} chip with arc-shape microelectrode arrays for the separation
of different-size particles},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {854--857},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068709},
doi = {10.1109/NEMS.2009.5068709},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChunagCHHHW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungC09,
author = {Chen{-}Kuei Chung and
W. T. Chang},
title = {Comparison of methods for sensing contact potential difference of
nanocrystalline alloy films using a kelvin actuating capacitor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {274--277},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068576},
doi = {10.1109/NEMS.2009.5068576},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCC09,
author = {Chen{-}Kuei Chung and
Y. L. Chang and
T. S. Chen},
title = {Influence of substrate bias on the resistivity and {TCR} of nanostructured
Ta-Si-N films},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {551--554},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068640},
doi = {10.1109/NEMS.2009.5068640},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungCC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCSC09,
author = {Chen{-}Kuei Chung and
T. C. Chen and
T. R. Shih and
W. T. Chang},
title = {Fabrication of a novel micro liquid flow sensor using a TaN thin film},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {885--888},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068716},
doi = {10.1109/NEMS.2009.5068716},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungCSC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungHHCS09,
author = {Yung{-}Chiang Chung and
Yen{-}Wen Hu and
Tsong{-}Long Hwang and
Po{-}Wen Chen and
Fong{-}Jian Sie},
title = {Acting force comparison of microbeads and hemocytes in microchannel
using optical tweezers system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1036--1039},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068750},
doi = {10.1109/NEMS.2009.5068750},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungHHCS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungJ09,
author = {Chen{-}Kuei Chung and
J. J. Jhu},
title = {Effect of nitrogen flow ratios on microstructure and mechanical properties
of nanocomposite Ti-Si-N thin flims},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {783--786},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068695},
doi = {10.1109/NEMS.2009.5068695},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungLCYLL09,
author = {Yung{-}Chiang Chung and
Yu{-}Cheng Lin and
Chaung{-}Di Chueh and
Chuan{-}You Ye and
Li{-}Wei Lai and
Wei{-}Chieh Liao},
title = {Microfluidic chip of fast {DNA} hybridization using denature and motion
of nucleic acids},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {960--963},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068733},
doi = {10.1109/NEMS.2009.5068733},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungLCYLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungSW09,
author = {Chen{-}Kuei Chung and
T. R. Shih and
B. H. Wu},
title = {Simulation of the novel micro-valve using dynamic analysis},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {527--530},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068634},
doi = {10.1109/NEMS.2009.5068634},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungSW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungSW09a,
author = {Chen{-}Kuei Chung and
T. R. Shih and
B. H. Wu},
title = {Characteristics of truncate-angle rhombic micromixer and rapid mold
fabrication using CO\({}_{\mbox{2}}\) laser micromachining},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {535--538},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068636},
doi = {10.1109/NEMS.2009.5068636},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ChungSW09a.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CongP09,
author = {Hailin Cong and
Tingrui Pan},
title = {Microfabrication of conductive {PDMS} on flexible substrates for biomedical
applications},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {731--734},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068682},
doi = {10.1109/NEMS.2009.5068682},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CongP09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CongRP09,
author = {Hailin Cong and
Alexander Revzin and
Tingrui Pan},
title = {Micropattern-assisted nanoassembly: Ordered nanocolloidal array on
{PEG} microstructures},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {735--738},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068683},
doi = {10.1109/NEMS.2009.5068683},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CongRP09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiCXZWW09,
author = {Yan Cui and
Huilin Chen and
Jinsong Xia and
Jiaxin Zhao and
Jing Wang and
Liding Wang},
title = {Study on {PSZT} thin films for microforce sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {286--290},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068579},
doi = {10.1109/NEMS.2009.5068579},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CuiCXZWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiZLXLJ09,
author = {Jing Cui and
Bingzhen Zhang and
Jun Liu and
Chengyang Xue and
Guowen Liu and
Xiaojuan Jia},
title = {Design of a novel sensor based on piezo-resistive effect of GaAs/AlGaAs/InGaAs
{PHEMT}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1103--1106},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068766},
doi = {10.1109/NEMS.2009.5068766},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/CuiZLXLJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiCWS09,
author = {Yinhong Dai and
Donghang Chen and
Lingyun Wang and
Daoheng Sun},
title = {Investigations on electrohydrodynamical drop-on-demand inkjet printing},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {310--313},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068584},
doi = {10.1109/NEMS.2009.5068584},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DaiCWS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingQYHC09,
author = {J. N. Ding and
H. S. Qi and
N. Y. Yuan and
Y. L. He and
G. G. Cheng},
title = {Influence of post-annealing on the mechanical and electrical properties
of boron-doped nanocrystalline silicon thin films},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {413--415},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068607},
doi = {10.1109/NEMS.2009.5068607},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DingQYHC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingYY09,
author = {Haitao Ding and
Zhenchuan Yang and
Guizhen Yan},
title = {Performance comparison of methods to evading notching effect for {SOG}
structures in {DRIE}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {5--8},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068514},
doi = {10.1109/NEMS.2009.5068514},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DingYY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingYYNTW09,
author = {Fei Ding and
Wenxuan Yu and
Tingting Yu and
Chao Ni and
Ruyan Tang and
Wengang Wu},
title = {A novel integrated micro-scale closed synthetic-jet-like flow field
as gas lubrication in {MEMS} devices},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {567--571},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068644},
doi = {10.1109/NEMS.2009.5068644},
timestamp = {Tue, 13 Jun 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/DingYYNTW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DongWL09,
author = {Zhuxin Dong and
Uchechukwu C. Wejinya and
Wen Jung Li},
title = {Calibration of {MEMS} accelerometer based on plane optical tracking
technique and measurements},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {893--897},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068718},
doi = {10.1109/NEMS.2009.5068718},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DongWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DongYMLCJ09,
author = {Ki{-}Young Dong and
Youngmin and
Seung{-}Il Moon and
Jinwoo Lee and
Jinnil Choi and
Byeong{-}Kwon Ju},
title = {Design of a multi-walled carbon nanotubes vacuum gauge},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {609--611},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068654},
doi = {10.1109/NEMS.2009.5068654},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DongYMLCJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuZPFLH09,
author = {Lidong Du and
Zhan Zhao and
Cheng Pang and
Zhen Fang and
Yonghong Liu and
Youjun Han},
title = {Micro solid state silicon plate wind velocity sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1--4},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068513},
doi = {10.1109/NEMS.2009.5068513},
timestamp = {Mon, 05 Feb 2024 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DuZPFLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuanZLZ09,
author = {Yuwen Duan and
Ru Zhang and
Peilin Lang and
Ying Zhang},
title = {Flat suppercontinuum generation in the inner cladding fiber with InP
nano thin film},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {996--999},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068741},
doi = {10.1109/NEMS.2009.5068741},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/DuanZLZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/EbrahimiSLH09,
author = {Sadollah Ebrahimi and
Jamshid Sabbaghzadeh and
Maryamalsadat Lajvardi and
Iraj Hadi},
title = {Nanolayer effects in cooling performance of a microchannel heat sink
with nanofluids containing CNTs},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {864--867},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068711},
doi = {10.1109/NEMS.2009.5068711},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/EbrahimiSLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FabrisSYSWY09,
author = {Drazen Fabris and
Tsutomu Saito and
Toshishige Yamada and
Xuhui Sun and
Patrick Wilhite and
Cary Y. Yang},
title = {Current capacity and thermal transport in carbon nanofiber interconnects},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {848--853},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068708},
doi = {10.1109/NEMS.2009.5068708},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/FabrisSYSWY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanZ09,
author = {Xuejiao Fan and
Dacheng Zhang},
title = {Parameter characterization of anodic bonded electrical interconnect
in {MEMS/NEMS} devices},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {198--201},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068558},
doi = {10.1109/NEMS.2009.5068558},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/FanZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FangLL09,
author = {Huajun Fang and
Xingming Liu and
Litian Liu},
title = {A uncooled a-Si infrared detector with novel thermal isolation method},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {682--685},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068671},
doi = {10.1109/NEMS.2009.5068671},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/FangLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FangZZ09,
author = {Dong{-}Ming Fang and
Haixia Zhang and
Xiao{-}Lin Zhao},
title = {Tunable {MEMS} capacitors considering deformation factor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {25--28},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068519},
doi = {10.1109/NEMS.2009.5068519},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/FangZZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GauHH09,
author = {Wei{-}Hsin Gau and
Shin{-}Chun Huang and
Yuh{-}Chung Hu},
title = {Fabrication and vibration analysis of micro-cross beams},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {211--214},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068561},
doi = {10.1109/NEMS.2009.5068561},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GauHH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GavanHDZ09,
author = {Khashayar Babaei Gavan and
Joost van der Heijden and
Emile W. J. M. van der Drift and
Herre S. J. van der Zant},
title = {Effect of pressure on the {Q} factor and the resonance frequency of
SiN microcantilevers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {380--384},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068600},
doi = {10.1109/NEMS.2009.5068600},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GavanHDZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GengLWL09,
author = {Zhaoxin Geng and
Qing Li and
Wei Wang and
Zhihong Li},
title = {Theoretical analysis and fabrication of PDMS-based surface plasmon
resonance sensor chips},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {51--54},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068525},
doi = {10.1109/NEMS.2009.5068525},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GengLWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GengZL09,
author = {Dongbing Geng and
Liming Zeng and
Yi Li},
title = {Thermo-oxidative stability of Nano-SiO\({}_{\mbox{2}}\) /bismaleimide
composite},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {698--702},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068675},
doi = {10.1109/NEMS.2009.5068675},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GengZL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GidwaniLZW09,
author = {Vinay Gidwani and
Yi Lu and
Donna D. Zhang and
Pak Kin Wong},
title = {Nanoengineered platforms for cancer chemoprevention},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {832--836},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068705},
doi = {10.1109/NEMS.2009.5068705},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GidwaniLZW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongGLLLZW09,
author = {Yibin Gong and
Huamin Gao and
Xiang Liu and
Wenping Liu and
Tie Li and
Ping Zhou and
Yuelin Wang},
title = {Silicon Nanowire fabricated by {MEMS} technology and its application
in biochemical detection},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {86--89},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068532},
doi = {10.1109/NEMS.2009.5068532},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GongGLLLZW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongNPMQ09,
author = {Zhongcheng Gong and
Krithika Nagarajan and
Siva Penmetsa and
David Mills and
Long Que},
title = {A patch-clamp device with integrated actuators for cell selection
and positioning},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {278--281},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068577},
doi = {10.1109/NEMS.2009.5068577},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GongNPMQ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongTSLNL09,
author = {Jie Gong and
Zirong Tang and
Tielin Shi and
Guanglan Liao and
Lei Nie and
Shiyuan Liu},
title = {Improved adhesion between {C-MEMS} and substrate by micromechanical
interlocking},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {624--627},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068658},
doi = {10.1109/NEMS.2009.5068658},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/GongTSLNL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HanFD09,
author = {Fengtian Han and
Zhenbin Fu and
Jingxin Dong},
title = {Design and simulation of an active electrostatic bearing for {MEMS}
micromotors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {80--85},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068531},
doi = {10.1109/NEMS.2009.5068531},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HanFD09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HanJJWSZ09,
author = {Guo Q. Han and
Zhuang D. Jiang and
Wei X. Jing and
Hai R. Wang and
Guo L. Sun and
Ming Z. Zhu},
title = {Fabrication and characterization of nano-scale lines through anodic
porous alumina membrane},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {722--725},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068680},
doi = {10.1109/NEMS.2009.5068680},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HanJJWSZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HaoL09,
author = {Ruican Hao and
Decai Li},
title = {Preparation of kerosene based nano-magnetic fluid and its application
in pressure difference sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {47--50},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068524},
doi = {10.1109/NEMS.2009.5068524},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HaoL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HaronHC09,
author = {Nor Zaidi Haron and
Said Hamdioui and
Sorin Cotofana},
title = {Emerging non-CMOS nanoelectronic devices - What are they?},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {63--68},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068528},
doi = {10.1109/NEMS.2009.5068528},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HaronHC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeCL09,
author = {Huiqi He and
Donald C. Chang and
Yi{-}Kuen Lee},
title = {Battery-powered miniaturized electroporation system for in-situ gene
transfer in stem cell research},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {147--151},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068546},
doi = {10.1109/NEMS.2009.5068546},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HeCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeCL09a,
author = {Huiqi He and
Donald C. Chang and
Yi{-}Kuen Lee},
title = {Battery-powered miniaturized electroporation system for in-situ gene
transfer in stem cell research},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {463--467},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068619},
doi = {10.1109/NEMS.2009.5068619},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HeCL09a.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeS09,
author = {Guang He and
Geng{-}Chen Shi},
title = {On the mechanical behavior of {LIGA} nickel},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {758--762},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068689},
doi = {10.1109/NEMS.2009.5068689},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HeS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HouNHX09,
author = {Anzhou Hou and
Henan Ni and
Chun Hui and
Ailan Xu},
title = {The development of piezoelectric biosensor based on nano-crystalline
PZT/quarts},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {923--925},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068725},
doi = {10.1109/NEMS.2009.5068725},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HouNHX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiaoLH09,
author = {Fei{-}Bin Hsiao and
Yung{-}Chun Lee and
Lee Chang Hsiang},
title = {Lamb wave excitation on non-piezoelectric materials using Lorentz
force induced by current in meander line structure},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {390--395},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068602},
doi = {10.1109/NEMS.2009.5068602},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HsiaoLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuYLHYC09,
author = {Shou{-}Ping Hsu and
Kao{-}Feng Yarn and
Win{-}Jet Luo and
I{-}Ting Hsieh and
Hong{-}Jun Ye and
Meng{-}Hua Chung},
title = {Microfluidic mixing with electrokinetic instability in a double T-shaped
microchannel},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {787--792},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068696},
doi = {10.1109/NEMS.2009.5068696},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HsuYLHYC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuLSGL09,
author = {Liang Hu and
Wenzhong Lou and
Renlong Song and
Chao Gao and
Xin Li},
title = {A novel design of micro-magnetic sensor guidance system for the blind},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {235--237},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068567},
doi = {10.1109/NEMS.2009.5068567},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HuLSGL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLSWL09,
author = {Xian Huang and
Siqi Li and
Jerome Schultz and
Qian Wang and
Qiao Lin},
title = {A biocompatible affinity {MEMS} sensor for continuous monitoring of
glucose},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {797--802},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068698},
doi = {10.1109/NEMS.2009.5068698},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HuangLSWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangTWQWL09,
author = {Xianju Huang and
Yu Tang and
Renxin Wang and
Chuang Qian and
Wei Wang and
Zhihong Li},
title = {A novel 3D flexible parylene-metal structure fabrication technique},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {907--910},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068721},
doi = {10.1109/NEMS.2009.5068721},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/HuangTWQWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JaisuttiYPO09,
author = {Rawat Jaisutti and
Wittawat Yamwong and
Sirapat Pratontep and
Tanakorn Osotchan},
title = {Effect of opposite side electrodes in organic field-effect transistor
structure},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {657--660},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068666},
doi = {10.1109/NEMS.2009.5068666},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JaisuttiYPO09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JenHL09,
author = {Chun{-}Ping Jen and
Ching{-}Te Huang and
Yun{-}Hung Lu},
title = {Numerical investigation of biochemical binding kinetics on the microfluidic
chip with {FO-LPR}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {751--753},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068687},
doi = {10.1109/NEMS.2009.5068687},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JenHL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiLB09,
author = {Yunguang Ji and
Yueh{-}Jaw Lin and
Alper Buldum},
title = {An investigation of buckypapers' Young's modulus utilizing nanoscale
modeling and Molecular Dynamics simulation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {771--774},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068692},
doi = {10.1109/NEMS.2009.5068692},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JiLB09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiLL09,
author = {Xiuling Ji and
Yunjian Liu and
Wenzhong Lou},
title = {Design and parametric study of a tubular passive micro direct methanol
fuel cell},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {343--347},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068592},
doi = {10.1109/NEMS.2009.5068592},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JiLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangZJPJ09,
author = {Zhuangde Jiang and
Fengxia Zhao and
Weixuan Jing and
Philip D. Prewett and
Kyle Jiang},
title = {Characterization of line edge roughness and line width roughness of
nano-scale typical structures},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {299--303},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068582},
doi = {10.1109/NEMS.2009.5068582},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JiangZJPJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangZY09,
author = {Yanfeng Jiang and
Xiaobo Zhang and
Bing Yang},
title = {Study on self-alignment property of silicon nanowire in temperature
gradient},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {926--929},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068726},
doi = {10.1109/NEMS.2009.5068726},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JiangZY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangZZPJ09,
author = {Zhuangde Jiang and
Libo Zhao and
Yulong Zhao and
Philip D. Prewett and
Kyle Jiang},
title = {Research and evaluation of a high temperature pressure sensor chip},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {661--665},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068667},
doi = {10.1109/NEMS.2009.5068667},
timestamp = {Fri, 10 Nov 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JiangZZPJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JunkinZW09,
author = {Michael Junkin and
Donna D. Zhang and
Pak Kin Wong},
title = {Plasma lithography for control of cell morphology and proliferation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {822--826},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068703},
doi = {10.1109/NEMS.2009.5068703},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/JunkinZW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangPCL09,
author = {Mi{-}Hyun Kang and
Chang{-}Sin Park and
Bo young Choi and
Dong{-}Weon Lee},
title = {Fabrication of a stepped shape tip using a self-descending phenomena
of meniscus},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1069--1072},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068758},
doi = {10.1109/NEMS.2009.5068758},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KangPCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimHLMK09,
author = {Ji{-}Hong Kim and
Sung{-}Min Hong and
Jang{-}Sub Lee and
Byung{-}Moo Moon and
Kunnyun Kim},
title = {High sensitivity capacitive humidity sensor with a novel polyimide
design fabricated by {MEMS} technology},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {703--706},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068676},
doi = {10.1109/NEMS.2009.5068676},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KimHLMK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimMTL09,
author = {Jin{-}Woo Kim and
Hyung{-}Mo Moon and
Steve Tung and
Hyun{-}Ho Lee},
title = {Highly effective bacterial removal system using carbon nanotube clusters},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1062--1064},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068756},
doi = {10.1109/NEMS.2009.5068756},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KimMTL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimPKHCHL09,
author = {Yu Jin Kim and
Il{-}Kyu Park and
Jin Soo Kim and
Joon Hwang and
Eui{-}Sik Chung and
Kang Moo Huh and
Yong{-}kyu Lee},
title = {Anticancer drug delivery for tumor targeting and therapy},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {919--922},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068724},
doi = {10.1109/NEMS.2009.5068724},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KimPKHCHL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KladsomboonPPK09,
author = {Sumana Kladsomboon and
Sirapat Pratontep and
Theeraporn Puntheeranurak and
Teerakiat Kerdcharoen},
title = {Investigation of thermal and methanol-vapor treatments for MgTPP as
an optical gas sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {843--847},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068707},
doi = {10.1109/NEMS.2009.5068707},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KladsomboonPPK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KraftD09,
author = {Michael Kraft and
Haitao Ding},
title = {Sigma-delta modulator based control systems for {MEMS} gyroscopes},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {41--46},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068523},
doi = {10.1109/NEMS.2009.5068523},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KraftD09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KwakPH09,
author = {Yeon H. Kwak and
Soon S. Park and
Sung M. Hong},
title = {A new 2D structure for chemotaxis measurement of adhesive cells},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {585--588},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068648},
doi = {10.1109/NEMS.2009.5068648},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/KwakPH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LanS09,
author = {Jinhui Lan and
Yuqiao Shi},
title = {Vehicle detection and recognition based on a {MEMS} magnetic sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {404--408},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068605},
doi = {10.1109/NEMS.2009.5068605},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LanS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCCL09,
author = {Yung{-}Chun Lee and
Hsueh{-}Liang Chen and
Chun{-}Hung Chen and
Hung{-}Yi Lin},
title = {Infrared heating and roller-based contact printing technology for
the fabrication of micro/nano-structures},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {779--782},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068694},
doi = {10.1109/NEMS.2009.5068694},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeCCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCL09,
author = {Yung{-}Chun Lee and
Pin{-}Chang Chen and
Hung{-}Yi Lin},
title = {Fabrication of seamless roller mold with excimer laser direct writing
technology},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {767--770},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068691},
doi = {10.1109/NEMS.2009.5068691},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeKP09,
author = {Yi Jae Lee and
Jung Doo Kim and
Jae Yeong Park},
title = {Nafion coated enzyme free glucose micro-biosensors for anti-fouling
of protein},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {335--338},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068590},
doi = {10.1109/NEMS.2009.5068590},
timestamp = {Sat, 30 Sep 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/LeeKP09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLHLLF09,
author = {Chi{-}Yuan Lee and
Shuo{-}Jen Lee and
Yuh{-}Chung Hu and
Chen{-}Hen Lin and
Yu{-}Ming Lee and
Wei{-}Yuan Fan},
title = {Integration of micro temperature sensor and metal foil as gas diffusion
layer for micro fuel cell},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {168--171},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068551},
doi = {10.1109/NEMS.2009.5068551},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeLHLLF09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLLC09,
author = {Chi{-}Yuan Lee and
Shuo{-}Jen Lee and
Yu{-}Ming Lee and
Kuan{-}Yu Chu},
title = {Integration of micro flow sensor and flexible substrate as {GDL} in
micro fuel cell},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {637--640},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068661},
doi = {10.1109/NEMS.2009.5068661},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeLLC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLLJJLHYC09,
author = {Ahra Lee and
SangChul Lee and
Sungsik Lee and
Chang Han Je and
Sunghae Jung and
Myoung{-}Lae Lee and
Gunn Hwang and
Byoung{-}Gon Yu and
Chang Auck Choi},
title = {Chip scale packaging with surface mountable solder ball terminals
for microsensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {612--615},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068655},
doi = {10.1109/NEMS.2009.5068655},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeLLJJLHYC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLSLCC09,
author = {Chi{-}Yuan Lee and
Shuo{-}Jen Lee and
Wen{-}Pin Shih and
Chen{-}Hen Lin and
Chi{-}Chung Chang and
Pei{-}Zen Chang},
title = {Fabrication of micro temperature sensor and heater in a stainless
steel-based micro reformer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {172--175},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068552},
doi = {10.1109/NEMS.2009.5068552},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeLSLCC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLT09,
author = {Yung{-}Chun Lee and
Yi{-}Chien Lin and
Chen{-}Hui Tsai},
title = {A novel method for fabricating aspheric fiber lens and its applications},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {775--778},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068693},
doi = {10.1109/NEMS.2009.5068693},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeLT09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeSDK09,
author = {Ju Seok Lee and
Joon Jin Song and
Russell J. Deaton and
Jin{-}Woo Kim},
title = {Exploring the potential of microarray technology for bio/nano sensing},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1065--1068},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068757},
doi = {10.1109/NEMS.2009.5068757},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeSDK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeSLTH09,
author = {Jeou{-}Long Lee and
Yung{-}Kang Shen and
Yi Lin and
Ping{-}Tun Teng and
Chuan{-}Min Huang},
title = {Fabrication and analysis of microfluidic mold insert by micro electrical
discharge machining},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {941--945},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068729},
doi = {10.1109/NEMS.2009.5068729},
timestamp = {Sat, 30 Sep 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/LeeSLTH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeX09,
author = {Chengkuo Lee and
Jin Xie},
title = {Development of vacuum packaged {CMOS} thermoelectric energy harvester},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {803--807},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068699},
doi = {10.1109/NEMS.2009.5068699},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeXTH09,
author = {Chengkuo Lee and
Wenfeng Xiang and
Jayaraj Thillaigovindan and
Fu{-}Li Hsiao},
title = {Nanomechanical cantilever sensor using optical nanocavity resonator},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {808--812},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068700},
doi = {10.1109/NEMS.2009.5068700},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeeXTH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LemmensM09,
author = {Ryan Lemmens and
Dennis Desheng Meng},
title = {Wedging leakage flow and its impact on the maximum pressure head of
bubble-driven micropumping},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1021--1025},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068747},
doi = {10.1109/NEMS.2009.5068747},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LemmensM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeuS09,
author = {Tzong{-}Shyng Leu and
Horng{-}Jiann Song},
title = {New pumping mechanism by surface waves in a microchannel},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {747--750},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068686},
doi = {10.1109/NEMS.2009.5068686},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LeuS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLLHH09,
author = {Weihua Li and
Wenzhong Lou and
Xin Li and
Rongsen Hong and
Liang Hu},
title = {Integration micro-magnetic sensor and accelerometer microsystem for
orienting application},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {206--210},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068560},
doi = {10.1109/NEMS.2009.5068560},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiLLHH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLWGMHLGX09,
author = {Yuguang Li and
Yinfeng Liu and
Liping Wang and
Beilei Gu and
Haiyan Mao and
Hefeng Hu and
Li Liu and
Ying Gu and
Yiben Xia},
title = {{UV} absorption and photoluminescence of nanometer-sized ZnS prepared
by different routes},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {458--462},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068618},
doi = {10.1109/NEMS.2009.5068618},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiLWGMHLGX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSL09,
author = {Qingzhou Li and
Ping Song and
Kejie Li},
title = {Structure optimization of a monolithic high-shock three-axis piezoresistive
accelerometer using Ant Colony Optimization},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {522--526},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068633},
doi = {10.1109/NEMS.2009.5068633},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiSL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiYY09,
author = {Yuan Li and
Zhenchuan Yang and
Guizhen Yan},
title = {An improved method to remove anti-footing Al layer after {DRIE}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {868--871},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068712},
doi = {10.1109/NEMS.2009.5068712},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiYY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiaoK09,
author = {Chen{-}Chieh Liao and
Ju{-}Nan Kuo},
title = {Shape and thermal effects of metal films on stress-induced bending
of surface micromachined curved grating},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {518--521},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068632},
doi = {10.1109/NEMS.2009.5068632},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiaoK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinJYWWL09,
author = {Jenn{-}Sen Lin and
Shin{-}Pon Ju and
Shih{-}Wen Yung and
Wen{-}Shian Wu and
Meng{-}Hsiung Weng and
Wen{-}Jay Lee},
title = {Mechanical and dynamical behavior of carbon nanotube with defects:
{A} molecular dynamics simulation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {539--542},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068637},
doi = {10.1109/NEMS.2009.5068637},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LinJYWWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinLY09,
author = {Hung{-}Chia Lin and
Yi{-}Ju Liu and
Da{-}Jeng Yao},
title = {{DNA} ligation using coplanar electrodes electro-wetting-ondielectric
{(EWOD)} device},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {385--389},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068601},
doi = {10.1109/NEMS.2009.5068601},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LinLY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinYC09,
author = {Chi{-}Chang Lin and
Ying{-}Mei Yang and
Hsien{-}Chang Chang},
title = {Raman descrimination of Helicobacter pylori fingerprint in dielectrophoresis
chip},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {793--796},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068697},
doi = {10.1109/NEMS.2009.5068697},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LinYC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinYYCC09,
author = {Chi{-}Chang Lin and
Chen{-}Yuan Yu and
Ying{-}Mei Yang and
Yan{-}Fu Chen and
Hsien{-}Chang Chang},
title = {Functionalized bio-nanoparticles in immunosensing using Surface-Enhanced
Raman scattering methods},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {877--880},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068714},
doi = {10.1109/NEMS.2009.5068714},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LinYYCC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinYYCLC09,
author = {Chi{-}Chang Lin and
Chen{-}Yuan Yu and
Ying{-}Mei Yang and
Yung{-}Ming Chu and
Hong{-}Ping Lin and
Hsien{-}Chang Chang},
title = {A novel {SERS} active particle with highly bio-organics absorption
affinity for the description of bacteria fingerprint},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {249--252},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068570},
doi = {10.1109/NEMS.2009.5068570},
timestamp = {Sat, 30 Sep 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/LinYYCLC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCXHZ09,
author = {Hai Liu and
Xiaohang Chen and
Dong Xu and
Zhongyu Hou and
Yafei Zhang},
title = {Microfabricated breath sensor based on carbon nanotubes for respiration
monitoring},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {102--105},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068536},
doi = {10.1109/NEMS.2009.5068536},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuCXHZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuJYWYJXYZZ09,
author = {Jun Liu and
Guoqing Jiang and
Shubin Yan and
Shaohui Wang and
Yingzhan Yan and
Yanfeng Jing and
Jijun Xiong and
Xiongying Ye and
Zhaoying Zhou and
Wendong Zhang},
title = {Design of the miniature optical fiber voltage sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1008--1012},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068744},
doi = {10.1109/NEMS.2009.5068744},
timestamp = {Mon, 26 Jun 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/LiuJYWYJXYZZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLCWLH09,
author = {Yu Liu and
Zushun Lu and
Xiaodong Chen and
Di Wang and
Jincheng Liu and
Lijiang Hu},
title = {Study on phenolic-resin/carbon-fiber ablation composites modified
with polyhedral oligomeric silsesquioxanes},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {605--608},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068653},
doi = {10.1109/NEMS.2009.5068653},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuLCWLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLL09,
author = {Qiang Liu and
Bo Liu and
Zhihong Li},
title = {Improvement of Au cantilever fabrication process with Cu as a sacrificial
layer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {872--876},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068713},
doi = {10.1109/NEMS.2009.5068713},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLYCW09,
author = {Yuntao Liu and
Xiaowei Liu and
Liang Yin and
Weiping Chen and
Qun Wu},
title = {CMOs interface circuitry for a closed-loop capacitive {MEMS} accelerometer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {510--513},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068630},
doi = {10.1109/NEMS.2009.5068630},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuLYCW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuTY09,
author = {Yi Liu and
Yaquan Tang and
Xiaomei Yu},
title = {SOI-based capacitive micromechanical resonator with submicron gap-spacing},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {130--133},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068542},
doi = {10.1109/NEMS.2009.5068542},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuTY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWDDF09,
author = {Qinghui Liu and
Xuezhong Wu and
Di Di and
Peitao Dong and
Dapeng Fan},
title = {Design of a novel {MEMS} {IDT} dual axes surface acoustic wave gyroscope},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {889--892},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068717},
doi = {10.1109/NEMS.2009.5068717},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LiuWDDF09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuXYXZ09,
author = {Xin Liu and
Chenyang Xue and
Shubin Yan and
Jijun Xiong and
Wendong Zhang},
title = {Integrated high sensitivity displacement sensor based on micro ring
resonator},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1000--1003},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068742},
doi = {10.1109/NEMS.2009.5068742},
timestamp = {Mon, 26 Jun 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/LiuXYXZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LongCZZWDGT09,
author = {Shu Long and
Zhong Cao and
Yu{-}Ting Zhao and
Yi Zhou and
Ming{-}Xing Wang and
Yun{-}Lin Dai and
Fu{-}Chun Gong and
Shu{-}Zhen Tan},
title = {Multi-wall carbon nanotubes film used for determination of salbutamol
sulfate},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1084--1087},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068761},
doi = {10.1109/NEMS.2009.5068761},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LongCZZWDGT09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LouSLLLL09,
author = {Wenzhong Lou and
Renlong Song and
Yunjian Liu and
Xiaosong Liu and
Weihua Li and
Wanfeng Lin},
title = {A novel multi-direction high shock reliability test on {MEMS} devices},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {261--264},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068573},
doi = {10.1109/NEMS.2009.5068573},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LouSLLLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuLCSHC09,
author = {Xuebin Lu and
Xiaowei Liu and
Rongyan Chuai and
Changzhi Shi and
Mingxue Huo and
Weiping Chen},
title = {Piezoresistive properties of heavily doped P-type polysilicon films},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {498--501},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068627},
doi = {10.1109/NEMS.2009.5068627},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LuLCSHC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuZWCC09,
author = {Yipeng Lu and
Weiping Zhang and
Xiaosheng Wu and
Wenyuan Chen and
Feng Cui},
title = {Design and analysis of novel solid biaxial micro-gyroscope with special
mode excitation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {291--294},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068580},
doi = {10.1109/NEMS.2009.5068580},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LuZWCC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuoDK09,
author = {Jian Luo and
Haitao Ding and
Michael Kraft},
title = {A new design methodology for electro-mechanical Sigma- Delta-Modulators},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {881--884},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068715},
doi = {10.1109/NEMS.2009.5068715},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LuoDK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LvCZ09,
author = {Pin Lv and
Zhe Chen and
Alice H. X. Zhang},
title = {Effect of laser annealing on amorphous silicon carbide films prepared
by {PECVD}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {743--746},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068685},
doi = {10.1109/NEMS.2009.5068685},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/LvCZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaCXZCL09,
author = {Gaoyin Ma and
Wenyuan Chen and
Qijun Xiao and
Weiping Zhang and
Feng Cui and
Kai Li},
title = {Single-neuron spinning control system for a non-silicon micromachined
rotational gyro},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {282--285},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068578},
doi = {10.1109/NEMS.2009.5068578},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/MaCXZCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MadisettiZGPLQ09,
author = {Shailesh Madisetti and
Zhiguo Zheng and
Zhongcheng Gong and
Siva Penmetsa and
Yuri Lvov and
Long Que},
title = {Layer-by-layer nanoscale-coating of microparticles with a droplet
microfluidic device},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {445--448},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068615},
doi = {10.1109/NEMS.2009.5068615},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/MadisettiZGPLQ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaoYLY09,
author = {Xu Mao and
Zhenchuan Yang and
Zhihong Li and
Guizhen Yan},
title = {The method of prevent footing effect in making {SOI} micro-mechanical
structure},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {506--509},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068629},
doi = {10.1109/NEMS.2009.5068629},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/MaoYLY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MehtaWC09,
author = {Karan Kartik Mehta and
Ting{-}Hsiang Wu and
Eric P. Y. Chiou},
title = {Magnetic nanowire-enhanced optomagnetic tweezers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1004--1007},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068743},
doi = {10.1109/NEMS.2009.5068743},
timestamp = {Fri, 05 Apr 2024 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/MehtaWC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MiaoJLZZSG09,
author = {Min Miao and
Yufeng Jin and
Hongguang Liao and
Liwei Zhao and
Yunhui Zhu and
Xin Sun and
Yunxia Guo},
title = {Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package
integration},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {90--93},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068533},
doi = {10.1109/NEMS.2009.5068533},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/MiaoJLZZSG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NaeemF09,
author = {Kashif Naeem and
Ouyang Feng},
title = {Effect of calcination on photocatalytic activity of Fe\({}^{\mbox{3+}}\)-doped
TiO\({}_{\mbox{2}}\) nanoparticles for degradation of phenol under
{UV} irradiation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {348--352},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068593},
doi = {10.1109/NEMS.2009.5068593},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NaeemF09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NguyenSRDBR09,
author = {Minh Duc Nguyen and
Ruud Johannes Antonius Steenwelle and
Paul M. te Riele and
Jan Matthijn Dekkers and
Dave H. A. Blank and
Guus Rijnders},
title = {Ferroelectric and dielectric properties of Pb(Zr, Ti)O\({}_{\mbox{3}}\)
thin film capacitors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {649--652},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068664},
doi = {10.1109/NEMS.2009.5068664},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NguyenSRDBR09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiWSH09,
author = {Henan Ni and
Liangcai Wu and
Zhitang Song and
Chun Hui},
title = {Memory characteristics of double-layer metal and semiconductor heterogeneous
nanocrystals embedded in SiO\({}_{\mbox{2}}\)},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {672--675},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068669},
doi = {10.1109/NEMS.2009.5068669},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NiWSH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiePSM09,
author = {Min Nie and
Pragnesh Patel and
Kai Sun and
Dennis Desheng Meng},
title = {Superhydrophilic anti-fog polyester film by oxygen plasma treatment},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1017--1020},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068746},
doi = {10.1109/NEMS.2009.5068746},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NiePSM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NieSTLL09,
author = {Lei Nie and
Tielin Shi and
Zirong Tang and
Shiyuan Liu and
Guanglan Liao},
title = {Low temperature direct bonding for hermetic wafer level packaging},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {472--475},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068621},
doi = {10.1109/NEMS.2009.5068621},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NieSTLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuLLH09,
author = {Zongwei Niu and
Zhiyong Li and
Li Li and
Rongguo Hou},
title = {Optimization of process parameters based on {ANN} when synthesizing
nano-size hydroxyapatite using Solgel method},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {420--423},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068609},
doi = {10.1109/NEMS.2009.5068609},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NiuLLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuLLH09a,
author = {Zongwei Niu and
Zhiyong Li and
Li Li and
Rongguo Hou},
title = {Thermodynamics analyse of the synthesizing of nano-size hydroxyapatite
using Sol-gel method},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {424--427},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068610},
doi = {10.1109/NEMS.2009.5068610},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/NiuLLH09a.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OuHYHLC09,
author = {Yu{-}Cheng Ou and
Chih{-}Wen Hsu and
Lung{-}Jieh Yang and
Hsieh{-}Cheng Han and
Yi{-}Wen Liu and
Chien{-}Yuan Chen},
title = {The micropatterns of glutaraldehyde-crosslinked gelatin as {ECM} for
attachment of tumor cells},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {314--318},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068585},
doi = {10.1109/NEMS.2009.5068585},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/OuHYHLC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PakulaRF09,
author = {Lukasz S. Pakula and
Vijayekumar Rajaraman and
Patrick J. French},
title = {{SOI} digital accelerometer based on pull-in time configuration},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {628--631},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068659},
doi = {10.1109/NEMS.2009.5068659},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PakulaRF09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PangZZSDFL09,
author = {Cheng Pang and
Zhan Zhao and
Jiangang Zhang and
Li Shi and
Lidong Du and
Zhen Fang and
Yonghong Liu},
title = {An advantageous fabrication technology to integrate pressure sensor
into multi-sensor for micro weather station},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {270--273},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068575},
doi = {10.1109/NEMS.2009.5068575},
timestamp = {Mon, 05 Feb 2024 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PangZZSDFL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ParkAPP09,
author = {Jungil Park and
Sunyoung Ahn and
Youngmi Kim Pak and
James Jungho Pak},
title = {2},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1054--1057},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068754},
doi = {10.1109/NEMS.2009.5068754},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ParkAPP09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ParkLKK09,
author = {Sewan Park and
Joonyeop Lee and
Hyeon Cheol Kim and
Kukjin},
title = {A study on inteference between 3D {MEMS} inductor and {VCO}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {454--457},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068617},
doi = {10.1109/NEMS.2009.5068617},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ParkLKK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PayamFY09,
author = {Amir Farrokh Payam and
Morteza Fathipour and
Mohammad Javad Yazdanpanah},
title = {A backstepping controller for piezoelectric actuators with hysteresis
in nanopositioning},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {711--716},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068678},
doi = {10.1109/NEMS.2009.5068678},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PayamFY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PayamYF09,
author = {Amir Farrokh Payam and
Mohammad Javad Yazdanpanah and
Morteza Fathipour},
title = {Design of a feedforward controller for {AFM} nanopositioning based
on neural network control theory},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {717--721},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068679},
doi = {10.1109/NEMS.2009.5068679},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PayamYF09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengSLTL09,
author = {Ping Peng and
Tielin Shi and
Guanglan Liao and
Zirong Tang and
Chang Liu},
title = {Scratch of submicron grooves on aluminum film with {AFM} diamond tip},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {983--986},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068738},
doi = {10.1109/NEMS.2009.5068738},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PengSLTL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengX09,
author = {Chunrong Peng and
Shanhong Xia},
title = {A novel micro-electrostatic field sensor based on parallel-plate resonator},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1092--1095},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068763},
doi = {10.1109/NEMS.2009.5068763},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PengX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengmanayolO09,
author = {Surachai Pengmanayol and
Tanakorn Osotchan},
title = {Effect of mixing hopping sites for carrier transport in organic semiconductor
nanodevices},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {694--697},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068674},
doi = {10.1109/NEMS.2009.5068674},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PengmanayolO09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PenmetsaZGLQ09,
author = {Siva Penmetsa and
Tianhua Zhang and
Zhongcheng Gong and
Tae{-}woo Lee and
Long Que},
title = {Design and modeling of a tunable optical antenna enabled by a micromachined
actuator},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {176--180},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068553},
doi = {10.1109/NEMS.2009.5068553},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/PenmetsaZGLQ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinLW09,
author = {Aimiao Qin and
Yuzi Liu and
Zhong Lin Wang},
title = {Solution growth of HgTe Nanoweires at lowtemperature},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {409--412},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068606},
doi = {10.1109/NEMS.2009.5068606},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/QinLW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinYCXY09,
author = {Wei Qin and
Weizheng Yuan and
Honglong Chang and
Liang Xue and
Guangmin Yuan},
title = {Fuzzy Adaptive Extended Kalman Filter for miniature Attitude and Heading
Reference System},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1026--1030},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068748},
doi = {10.1109/NEMS.2009.5068748},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/QinYCXY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QiuCM09,
author = {Jin Qiu and
Shawn Cunningham and
Arthur Morris},
title = {Effect of sacrificial layer compliance on thermal stresses of composite
{MEMS} beams},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1073--1078},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068759},
doi = {10.1109/NEMS.2009.5068759},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/QiuCM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QuBSRHX09,
author = {Lan Qu and
Chao Bian and
Jizhou Sun and
Zhenxing Ren and
Jinghong Han and
Shanhong Xia},
title = {Electrochemical synthesis of gold nanoparticles in polypyrrole for
antibody immobilization},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {597--600},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068651},
doi = {10.1109/NEMS.2009.5068651},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/QuBSRHX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QuDTL09,
author = {Yanli Qu and
Zaili Dong and
Steve C. H. Tung and
Wen Jung Li},
title = {Experimental investigation on the dynamic response of thermal {EG-CNT}
flow sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {813--817},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068701},
doi = {10.1109/NEMS.2009.5068701},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/QuDTL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RaoLW09,
author = {Fubo Rao and
Tie Li and
Yuelin Wang},
title = {Synthesis of horizontally aligned single-walled carbon nanotubes without
external force and their growth characteristics},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {559--562},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068642},
doi = {10.1109/NEMS.2009.5068642},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/RaoLW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SadeghianYGGDZFBK09,
author = {Hamed Sadeghian and
Chung Kai Yang and
Khashayar Babaei Gavan and
Hans Goosen and
Emile W. J. M. van der Drift and
Here van der Zant and
Paddy J. French and
Andre Bossche and
Fred van Keulen},
title = {Surface contamination-induced resonance frequency shift of cantilevers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {400--403},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068604},
doi = {10.1109/NEMS.2009.5068604},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SadeghianYGGDZFBK09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiLC09,
author = {Changzhi Shi and
Xiaowei Liu and
Rongyan Chuai},
title = {{DC} electrical trimming characteristics of polysilicon nanofilms
with different doping concentrations},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {686--689},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068672},
doi = {10.1109/NEMS.2009.5068672},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ShiLC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiZJZL09,
author = {Guangyi Shi and
Yuexian Zou and
Yufeng Jin and
Yali Zheng and
Wen Jung Li},
title = {Multi-category human motion recognition based on {MEMS} inertial sensing
data},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {489--493},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068625},
doi = {10.1109/NEMS.2009.5068625},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ShiZJZL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiehHHL09,
author = {Dar{-}Bin Shieh and
Chia{-}Chun Hsieh and
Song{-}Bin Huang and
Gwo{-}Bin Lee},
title = {A microfluidic-based cell culture platform for cellular and subcellular
imaging},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {223--226},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068564},
doi = {10.1109/NEMS.2009.5068564},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ShiehHHL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SinGGW09,
author = {Mandy L. Y. Sin and
Vinay Gidwani and
Vincent Gau and
Pak Kin Wong},
title = {An electrothermal micromixer for molecular analysis},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {827--831},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068704},
doi = {10.1109/NEMS.2009.5068704},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SinGGW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuLCWC09,
author = {C. C. Su and
C. H. Li and
N. K. Chang and
T. C. Wu and
S. H. Chang},
title = {Fabrication of carbon nanocoils based tactile sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {707--710},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068677},
doi = {10.1109/NEMS.2009.5068677},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SuLCWC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SubramanianRS09,
author = {S. Subramanian and
J. S. Rathore and
N. N. Sharma},
title = {Design and analysis of helical flagella propelled nanorobots},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {950--953},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068731},
doi = {10.1109/NEMS.2009.5068731},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SubramanianRS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunBQX09,
author = {Jizhou Sun and
Chao Bian and
Lan Qu and
Shanhong Xia},
title = {A micro amperometric immunosensor immobilized with electropolymerized
staphylococcal protein a for the detection of salmonella typhimurium},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {295--298},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068581},
doi = {10.1109/NEMS.2009.5068581},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SunBQX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunS09,
author = {Shao{-}Chun Sun and
Geng{-}Chen Shi},
title = {Research on the output characteristics of {MEMS} convective accelerometer
under heavy impact},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {33--36},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068521},
doi = {10.1109/NEMS.2009.5068521},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SunS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunTZM09,
author = {Tao Sun and
Soichiro Tsuda and
Klaus{-}Peter Zauner and
Hywel Morgan},
title = {Single cell imaging using electrical impedance tomography},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {858--863},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068710},
doi = {10.1109/NEMS.2009.5068710},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SunTZM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunWJGYH09,
author = {Guo L. Sun and
Hai R. Wang and
Zhuang D. Jiang and
Xian N. Gao and
Tian S. Yin and
Guo Q. Han},
title = {Design of Pt electrode in a SO\({}_{\mbox{2}}\) gas sensor based on
LaF\({}_{\mbox{3}}\)solid electrolyte},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {543--546},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068638},
doi = {10.1109/NEMS.2009.5068638},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SunWJGYH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunZLWL09,
author = {Hua Sun and
Haixu Zhou and
Xiang Li and
Yanhui Wei and
Xiao Li},
title = {Design of two-wheel self-balanced electric vehicle based on {MEMS}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {143--146},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068545},
doi = {10.1109/NEMS.2009.5068545},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/SunZLWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangCZ09,
author = {Wei Tang and
Zhe Chen and
Haixia Zhang},
title = {A novel method of anodic bonding},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {739--742},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068684},
doi = {10.1109/NEMS.2009.5068684},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TangCZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangLZW09,
author = {Jialu Tang and
Xiaowei Liu and
Haifeng Zhang and
Xilian Wang},
title = {Investigation of electrostatic bonding time model with point cathode},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1096--1098},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068764},
doi = {10.1109/NEMS.2009.5068764},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TangLZW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangYYZLWM09,
author = {Ping Tang and
Jian Yang and
Jianjun Ye and
Jinyang Zheng and
Chikong Lam and
Ieong Wong and
Yanbao Ma},
title = {Using the improved {DSMC} method to predict the reliability of micro-flow
channels},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {353--358},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068594},
doi = {10.1109/NEMS.2009.5068594},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TangYYZLWM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TaoZSWZXJCSW09,
author = {Ke Tao and
Dexian Zhang and
Yun Sun and
Linshen Wang and
Jingfang Zhao and
Ying Xue and
Yuanjian Jiang and
Hongkun Cai and
Yanping Sui and
Jin Wang},
title = {Boron doped hydrogenated nanocrystalline silicon thin films prepared
by layer-by-layer technique and its application in n-i-p flexible
amorphous silicon thin film solar cells},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {327--330},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068588},
doi = {10.1109/NEMS.2009.5068588},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TaoZSWZXJCSW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianZJZLLM09,
author = {Bian Tian and
Yulong Zhao and
Zhuangde Jiang and
Ling Zhang and
Nansheng Liao and
Yuanhao Liu and
Chao Meng},
title = {The analysis and structural design of micro {SOI} pressure sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {55--58},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068526},
doi = {10.1109/NEMS.2009.5068526},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TianZJZLLM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TranNNHN09,
author = {Tan D. Tran and
Minh D. Nguyen and
Long T. Nguyen and
Tue Huu Huynh and
Thuy P. Nguyen},
title = {Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {112--115},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068538},
doi = {10.1109/NEMS.2009.5068538},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TranNNHN09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TreetharnmathurotOWW09,
author = {Benjaporn Treetharnmathurot and
Chitchamai Ovatlarnporn and
Juraithip Wungsinthaweekul and
Ruedeekorn Wiwattanapatapee},
title = {Chemical modification and thermal stability study of ss-cyclodextrin-
and PAMAM-trypsin conjugates},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {954--959},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068732},
doi = {10.1109/NEMS.2009.5068732},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TreetharnmathurotOWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsaiLCY09,
author = {Tsung{-}Han Tsai and
Dar{-}Sun Liou and
Ping{-}Hei Chen and
Chin{-}Ting Yang},
title = {Enhancement of mixing performance of water solutions in a micro-mixer
with immiscible ferrofluid},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {69--74},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068529},
doi = {10.1109/NEMS.2009.5068529},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/TsaiLCY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanDCHLQ09,
author = {Jing Wan and
Shao{-}Ren Deng and
Yifang Chen and
Ejaz Huq and
Ran Liu and
Xin{-}Ping Qu},
title = {Trilayer nanoimprint fabrication and simulation of the silicon nanowire
sensor for gas detection},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1013--1016},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068745},
doi = {10.1109/NEMS.2009.5068745},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WanDCHLQ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCFL09,
author = {Jing{-}Hui Wang and
Meng{-}Ku Chi and
Lung{-}Ming Fu and
Che{-}Hsin Lin},
title = {Experimental and numerical investigations into high-voltage pulsed
{DC} electric fields for enhancing {CE} chip performance},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {726--730},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068681},
doi = {10.1109/NEMS.2009.5068681},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangCFL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCZLLH09,
author = {Di Wang and
Xiaodong Chen and
Qun Zhang and
Yu Liu and
Jincheng Liu and
Lijiang Hu},
title = {Calculation of phase transformation of vanadium oxide using {MD} simulation
and its validation by experimental values},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {593--596},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068650},
doi = {10.1109/NEMS.2009.5068650},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangCZLLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLFSDWSBLO09,
author = {Jinxing Wang and
Apurba Laha and
Andreas Fissel and
Dominik Schwendt and
Rytis Dargis and
Tatsuro Watahiki and
Roman Shayduk and
Wolfgang Braun and
Tianmo Liu and
H. J{\"{o}}rg Osten},
title = {Structural and strain relaxation study of epitaxially grown nano-thick
Nd\({}_{\mbox{2}}\)O\({}_{\mbox{3}}\)/Si(111) heterostructure},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {436--440},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068613},
doi = {10.1109/NEMS.2009.5068613},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangLFSDWSBLO09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLG09,
author = {Shenggui Wang and
Liwei Lin and
Hang Guo},
title = {Analysis and design of a micromachined Rb-85 filter in passive rubidium
atomic clock},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {911--914},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068722},
doi = {10.1109/NEMS.2009.5068722},
timestamp = {Sun, 12 Nov 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangLG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLLGZT09,
author = {Jin Wang and
Guofeng Li and
Yiyi Liu and
Yi Lu and
Xianhu Gao and
Yong Zhang and
Ke Tao},
title = {Vehicle supervision system based on {MEMS} geomagnetic sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {331--334},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068589},
doi = {10.1109/NEMS.2009.5068589},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangLLLGZT09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangQSPC09,
author = {Jing Wang and
Bing Qu and
Yan Ming Su and
Chao Pan and
Wei Guo Cai},
title = {Artifical fish flocked surface as a possible anti-biofoulant},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {323--326},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068587},
doi = {10.1109/NEMS.2009.5068587},
timestamp = {Tue, 11 Apr 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/WangQSPC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangWW09,
author = {Yi{-}Feng Wang and
Rui{-}jin Wang and
Ling{-}na Wang},
title = {Research on mixing mechanism of micromixer based on segmented gas-liquid
flow},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {930--934},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068727},
doi = {10.1109/NEMS.2009.5068727},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYLWW09,
author = {Chaohui Wang and
Peng Ye and
Kerun Lee and
Jingju Wang and
Jing Wang},
title = {The design and fabrication of a new blood-filtering chip based on
{SU-8} and {PDMS}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {468--471},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068620},
doi = {10.1109/NEMS.2009.5068620},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangYLWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYYJL09,
author = {Cheng{-}Chi Wang and
Her{-}Terng Yau and
Yen{-}Liang Yeh and
Ming{-}Jyi Jang and
Jing{-}Fung Lin},
title = {Influence of the bearing number on micro gas bearing system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {975--979},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068736},
doi = {10.1109/NEMS.2009.5068736},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangYYJL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZLS09,
author = {Lingyun Wang and
Yibo Zeng and
Wenwang Li and
Daoheng Sun},
title = {Etch-back in {DDSOG} process by ultrasonic agitation and application
to tunneling gyroscope fabrication},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {156--159},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068548},
doi = {10.1109/NEMS.2009.5068548},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WangZLS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiZH09,
author = {Shuhua Wei and
Jinzhao Zhang and
Li Han},
title = {Design and implementation of software system of E-beam lithography
based on {SEM}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {547--550},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068639},
doi = {10.1109/NEMS.2009.5068639},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WeiZH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WenZXWC09,
author = {Li Wen and
Qiuping Zhang and
Weiwei Xiang and
Hai Wang and
Jiaru Chu},
title = {Design and fabrication of the microplasma reactor for maskless scanning
plasma etching},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {577--580},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068646},
doi = {10.1109/NEMS.2009.5068646},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WenZXWC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WengHYL09,
author = {Chen{-}Hsun Weng and
Chih{-}Chia Huang and
Chen{-}Sheng Yeh and
Gwo{-}Bin Lee},
title = {Using micro-reactors to synthesize alloy FeGa\({}_{\mbox{2}}\)O\({}_{\mbox{4}}\)
magnetic nanoparticles},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {219--222},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068563},
doi = {10.1109/NEMS.2009.5068563},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WengHYL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuCZLCZ09,
author = {Xiaosheng Wu and
Wenyuan Chen and
Weiping Zhang and
Yipeng Lu and
Feng Cui and
Xiaolin Zhao},
title = {Modeling analysis of piezoelectric micromachined modal gyroscope {(PMMG)}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {304--309},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068583},
doi = {10.1109/NEMS.2009.5068583},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuCZLCZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuDlLLXW09,
author = {Xuezhong Wu and
Peitao Dong and
Zhaoze li and
Shengyi Li and
Qinghui Liu and
Chao Xu and
Hong Wan},
title = {Design, fabrication and characterization of a solid propellant micro-Thruster},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {476--479},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068622},
doi = {10.1109/NEMS.2009.5068622},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuDlLLXW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuMW09,
author = {Di Wu and
Haiyang Mao and
Wengang Wu},
title = {Fabrication of compact collateral silicon nanowires based on continuously
alternating deposition},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {601--604},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068652},
doi = {10.1109/NEMS.2009.5068652},
timestamp = {Fri, 15 Dec 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuMW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuWS09,
author = {Dezhi Wu and
Lingyun Wang and
Daoheng Sun},
title = {Patterned deposition of {PEO} nanofibers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {589--592},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068649},
doi = {10.1109/NEMS.2009.5068649},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuWS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuWSH09,
author = {Zhigang Wu and
Grzegorz Wicher and
Asa Fex Svenningsen and
Klas Hjort},
title = {Microfluidic high viability separation of neural cells},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1079--1083},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068760},
doi = {10.1109/NEMS.2009.5068760},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuWSH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuYCLGZ09,
author = {Kang Wu and
Xiongying Ye and
Feng Chen and
Litao Liu and
Linrui Guo and
Zhaoying Zhou},
title = {Micromachined interferometric accelerometer fabricated using {SGADER}
process},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1058--1061},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068755},
doi = {10.1109/NEMS.2009.5068755},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/WuYCLGZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiangWWZC09,
author = {Weiwei Xiang and
Li Wen and
Hai Wang and
Qiuping Zhang and
Jiaru Chu},
title = {Electrical and optical testing system for microplasma in scanning
plasma etching},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {572--576},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068645},
doi = {10.1109/NEMS.2009.5068645},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XiangWWZC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaoCMCLZ09,
author = {Qijun Xiao and
Wenyuan Chen and
Gaoyin Ma and
Feng Cui and
Shengyong Li and
Weiping Zhang},
title = {Simulation of levitation control for a micromachined electrostatically
levitated gyroscope},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {160--163},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068549},
doi = {10.1109/NEMS.2009.5068549},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XiaoCMCLZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaoLD09,
author = {Peng Xiao and
Wen Jung Li and
Ruxu Du},
title = {Experimental investigation of CNT-Based micro bubble generation inside
microchannels},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1043--1047},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068752},
doi = {10.1109/NEMS.2009.5068752},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XiaoLD09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaoXHWL09,
author = {Dingbang Xiao and
Liqiang Xie and
Zhanqiang Hou and
Xuezhong Wu and
Shengyi Li},
title = {Analyzing the frequency response of micromachined capacitive inertial
devices by the third harmonic detection},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {339--342},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068591},
doi = {10.1109/NEMS.2009.5068591},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XiaoXHWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieXWWL09,
author = {Liqiang Xie and
Dingbang Xiao and
Haoxu Wang and
Xuezhong Wu and
Shengyi Li},
title = {Sensitivity analysis and structure design for tri-mass structure micromachined
gyroscope},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {126--129},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068541},
doi = {10.1109/NEMS.2009.5068541},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XieXWWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieYC09,
author = {Jianbing Xie and
Weizheng Yuan and
Honglong Chang},
title = {A novel method for the manufacture of {MEMS} devices with large exposed
area based on {SOI} wafers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {253--256},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068571},
doi = {10.1109/NEMS.2009.5068571},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XieYC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XingHJ09,
author = {Xing Song and
Haifeng Dong and
Jiancheng Fang},
title = {Chip scale atomic magnetometer based on {SERF}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {231--234},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068566},
doi = {10.1109/NEMS.2009.5068566},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XingHJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XingLZG09,
author = {Yumei Xing and
Yigui Li and
Junfeng Zhang and
Gaoyang Gao},
title = {Surface acoustic wave linear motor for two-dimensional optical positioning
system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {555--558},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068641},
doi = {10.1109/NEMS.2009.5068641},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XingLZG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuBLM09,
author = {Xin Xu and
Bogdan Bercu and
Fran{\c{c}}ois Lime and
Laurent Mont{\`{e}}s},
title = {Finite elements study of high mechanical stress in nanostructures
for innovative {NEMS} sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {676--681},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068670},
doi = {10.1109/NEMS.2009.5068670},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XuBLM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuS09,
author = {Shiyou Xu and
Yong Shi},
title = {High sensitivity, low operational temperature {ITO} nano gas sensor
with integrated circuits},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {690--693},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068673},
doi = {10.1109/NEMS.2009.5068673},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XuS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuYCM09,
author = {Jinghui Xu and
Weizheng Yuan and
Honglong Chang and
Binghe Ma},
title = {Angularly parameterized macromodel extraction for microstructures
with a large number of terminals},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {37--40},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068522},
doi = {10.1109/NEMS.2009.5068522},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XuYCM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuYLM09,
author = {Jun Xu and
Bo You and
Xin Li and
Jing Ma},
title = {A high sensitivity quartz tuning fork temperature sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {616--619},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068656},
doi = {10.1109/NEMS.2009.5068656},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XuYLM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZY09,
author = {Ding{-}jun Xu and
Zheng{-}yong Zhang and
Zhen Yu},
title = {Analysis on thermal balance and design principles of catalytic combustion
gas sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {898--903},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068719},
doi = {10.1109/NEMS.2009.5068719},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XuZY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XueYCJ09,
author = {Liang Xue and
Weizheng Yuan and
Honglong Chang and
Chengyu Jiang},
title = {MEMS-based multi-sensor integrated attitude estimation technology
for {MAV} applications},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1031--1035},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068749},
doi = {10.1109/NEMS.2009.5068749},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/XueYCJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Ya-ZhouLJ09,
author = {Wang Ya{-}Zhou and
Chen Li{-}Xin and
Song Jia{-}Le},
title = {Characterization of Si\({}_{\mbox{3}}\)N\({}_{\mbox{4}}\)/SiC Microstructure
Derived from {UV} curable polymer ceramic precursor pyrolyzing},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {185--189},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068555},
doi = {10.1109/NEMS.2009.5068555},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/Ya-ZhouLJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamarthyM09,
author = {Chakravarthy Yamarthy and
Shamus McNamara},
title = {Design of a {MEMS} sensor to detect the Casimir force},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {645--648},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068663},
doi = {10.1109/NEMS.2009.5068663},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YamarthyM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanWYHWRYZXL09,
author = {Shubin Yan and
Baohua Wang and
Yingzhan Yan and
Nini Hao and
Shaohui Wang and
Xiaohong Ren and
Xiongying Ye and
Zhaoying Zhou and
Chenyang Xue and
Jun Liu},
title = {The analysis of microtoroid cavity coupling system based on fullwave},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {991--995},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068740},
doi = {10.1109/NEMS.2009.5068740},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YanWYHWRYZXL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanYJWWJXYZZ09,
author = {Shubin Yan and
Yingzhan Yan and
Zhe Ji and
Baohua Wang and
Shaohui Wang and
Guoqing Jiang and
Jijun Xiong and
Xiongying Ye and
Zhaoying Zhou and
Wendong Zhang},
title = {A precise measurement of quality factor for Planar Microtoroid Resonators},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {13--16},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068516},
doi = {10.1109/NEMS.2009.5068516},
timestamp = {Mon, 26 Jun 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/YanYJWWJXYZZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangCYLL09,
author = {Sung{-}Yi Yang and
Fong{-}Yu Cheng and
Chen{-}Sheng Yeh and
Huan{-}Yao Lei and
Gwo{-}Bin Lee},
title = {Synthesis of gold nanoparticles using a vortex-type micro-mixing system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {227--230},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068565},
doi = {10.1109/NEMS.2009.5068565},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangCYLL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangL09,
author = {Yang Yang and
Jing Liu},
title = {Controlling of micro/nano fluidics array using single ice valve},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {238--243},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068568},
doi = {10.1109/NEMS.2009.5068568},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangL09a,
author = {Yang Yang and
Jing Liu},
title = {Theoretical characterization on nano freeze tweezer enabled from convective
cooling principle},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {244--248},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068569},
doi = {10.1109/NEMS.2009.5068569},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangL09a.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangLJCY09,
author = {Kai Yang and
Zhigang Li and
Yupeng Jing and
Dapeng Chen and
Tianchun Ye},
title = {Research on the resonant frequency formula of V-shaped cantilevers},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {59--62},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068527},
doi = {10.1109/NEMS.2009.5068527},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangLJCY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangOL09,
author = {Li Yang and
Mengxing Ouyang and
Wen Jung Li},
title = {Extreme-low power NaOCl sensor using EG-CNTs as Sensing Element},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1048--1053},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068753},
doi = {10.1109/NEMS.2009.5068753},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangOL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangWL09,
author = {Chenying Yang and
Wei Wang and
Zhihong Li},
title = {Optimization of corona-triggered {PDMS-PDMS} bonding method},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {319--322},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068586},
doi = {10.1109/NEMS.2009.5068586},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YangWL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YaoGSSUY09,
author = {Sen Yao and
Shunji Goto and
Junpei Sakurai and
Tadahiko Shinshi and
Minoru Uehara and
Hitoshi Yamamoto},
title = {SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic
thin film},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {416--419},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068608},
doi = {10.1109/NEMS.2009.5068608},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YaoGSSUY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YauWCJ09,
author = {Her{-}Terng Yau and
Cheng{-}Chi Wang and
Ching{-}Chang Cho and
Ming{-}Jyi Jang},
title = {Numerical simulation of an electrokinetic micromixer using harmonic
and chaotic electric fields},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {970--974},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068735},
doi = {10.1109/NEMS.2009.5068735},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YauWCJ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YeYZXLWM09,
author = {Jianjun Ye and
Jian Yang and
Jinyang Zheng and
Ping Xu and
Chikong Lam and
Ieong Wong and
Yanbao Ma},
title = {Effects of wall temperature on the heat and mass transfer in microchannels
using the {DSMC} method},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {666--671},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068668},
doi = {10.1109/NEMS.2009.5068668},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YeYZXLWM09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YehLZCL09,
author = {Chia{-}Hsien Yeh and
Po{-}Wen Lin and
Qiaole Zhao and
Tsung{-}Che Chou and
Yu{-}Cheng Lin},
title = {Application of microfluidic system to construct cross-linked chitosan
microfibers by {PDMS} chip},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {904--906},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068720},
doi = {10.1109/NEMS.2009.5068720},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YehLZCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YehYHLCS09,
author = {Fu{-}Wen Yeh and
Lung{-}Jieh Yang and
Guo{-}Yuan Hess and
Ching{-}Jiun Lee and
Che{-}Chien Chu and
Horn{-}Jiunn Sheen},
title = {The arrowed surface ratchets with hydrophobic parylene for droplet
transportation},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {359--362},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068595},
doi = {10.1109/NEMS.2009.5068595},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YehYHLCS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YiLWW09,
author = {Jikun Yi and
Wei Li and
Lingfang Wang and
Zhiyu Wen},
title = {The simulation of frequency-capacitance characteristics of fresh water
conductivity sensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {29--32},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068520},
doi = {10.1109/NEMS.2009.5068520},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YiLWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YinLCCZ09,
author = {Liang Yin and
Xiaowei Liu and
Wei Chen and
Weiping Chen and
Zhiping Zhou},
title = {A low-noise {CMOS} interface circuit for closed-loop accelerometer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {502--505},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068628},
doi = {10.1109/NEMS.2009.5068628},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YinLCCZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YingWZ09,
author = {Dong Ying and
Wei Gao and
You Zheng},
title = {Direct bonding {SOI} Wafer based {MEMS} cantilever resonator for trace
gas sensor applicaiton},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {134--138},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068543},
doi = {10.1109/NEMS.2009.5068543},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YingWZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuJDQLW09,
author = {Haibo Yu and
Niandong Jiao and
Zaili Dong and
Yanli Qu and
Wen Jung Li and
Yuechao Wang},
title = {Nanoscale welding by {AFM} tip induced electric field},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {116--120},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068539},
doi = {10.1109/NEMS.2009.5068539},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YuJDQLW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuYYLW09,
author = {Yiting Yu and
Weizheng Yuan and
Bin Yan and
Taiping Li and
Lanlan Wang},
title = {Two new micro programmable gratings and their potential applications},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {946--949},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068730},
doi = {10.1109/NEMS.2009.5068730},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YuYYLW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuZ09,
author = {Ling{-}min Yu and
Chang{-}Chun Zhu},
title = {Electrophoresis deposition and field emission properties of composites
films ZnO nanoneedles/CNTs},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {9--12},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068515},
doi = {10.1109/NEMS.2009.5068515},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YuZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuanCTSXXW09,
author = {Ding Yuan and
Pengliang Ci and
Fei Tian and
Jing Shi and
Shaohui Xu and
Peisheng Xin and
Lianwei Wang},
title = {The improvement of electrochemical etching process for silicon microchannel
plates},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {964--969},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068734},
doi = {10.1109/NEMS.2009.5068734},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/YuanCTSXXW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaiGWLLZ09,
author = {Guangmei Zhai and
Hua Gong and
Minqiang Wang and
Zhonghai Lin and
Kaiping Liu and
Daoli Zhang},
title = {Low temperature growth of ZnO rods by EDTA-assisted hydrothermal synthesis},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1088--1091},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068762},
doi = {10.1109/NEMS.2009.5068762},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaiGWLLZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaiZYZ09,
author = {Guangmei Zhai and
Daoli Zhang and
Lin Yuan and
Jianbing Zhang},
title = {Synthesis and studies of spindle-shaped lead selenide nanocrystals},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {367--370},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068597},
doi = {10.1109/NEMS.2009.5068597},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaiZYZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangB09,
author = {Lujun Zhang and
Andre Bossche},
title = {Low voltage plug dispersion compensation for moving field capillary
electrophoresis with flow loss via the side channels},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {581--584},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068647},
doi = {10.1109/NEMS.2009.5068647},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangB09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangBG09,
author = {Yi Zhang and
Daqun Bao and
Hang Guo},
title = {Growth and characterization of {PZT} thin films with {A} Pt/Ti layer
on silicon substrate},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {915--918},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068723},
doi = {10.1109/NEMS.2009.5068723},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangBG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangGQ09,
author = {Tianhua Zhang and
Zhongcheng Gong and
Long Que},
title = {A white-light source operated polymer-based micromachined Fabry-Perot
chemo/biosensor},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {181--184},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068554},
doi = {10.1109/NEMS.2009.5068554},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangGQ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHY09,
author = {Jia{-}Hong Zhang and
Qing{-}An Huang and
Hong Yu},
title = {Effect of temperature and elastic constant correction on piezoresistivity
of silicon nanobeams},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {164--167},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068550},
doi = {10.1109/NEMS.2009.5068550},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangHY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangJX09,
author = {Xiuling Zhang and
Feng Jin and
Jianxin Xing},
title = {Electroreduction of nitrite based on Ag/PPy nanowires modified electrodes},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {194--197},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068557},
doi = {10.1109/NEMS.2009.5068557},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangJX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLHXG09,
author = {Junfeng Zhang and
Yigui Li and
Chun Hui and
Yumei Xing and
Yang Gao},
title = {Research on a novel {SAW} actuator of Floating Electrode Unidirectional
Transducer},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {620--623},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068657},
doi = {10.1109/NEMS.2009.5068657},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangLHXG09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLPWWC09,
author = {Hai{-}Feng Zhang and
Xiao{-}wei Liui and
Zhi{-}cheng Peng and
Xi{-}Lian Wang and
Wei Wang and
Yufeng Chen},
title = {Design of movable contactless conductivity detector for microchip
capillary electrophoresis},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {190--193},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068556},
doi = {10.1109/NEMS.2009.5068556},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangLPWWC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLS09,
author = {Chuanwei Zhang and
Shiyuan Liu and
Tielin Shi},
title = {Metrology of deep trench structures with polarized {FTIR} reflectance
spectrum},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {531--534},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068635},
doi = {10.1109/NEMS.2009.5068635},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangLS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLSWZ09,
author = {Hai{-}Feng Zhang and
Xiao{-}wei Liui and
Xian{-}hui Shao and
Xi{-}Lian Wang and
Bin Zhou},
title = {The study of the improved wavelet thresholding with translation invariant
de-noising on capillary electrophoresis signal},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1099--1102},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068765},
doi = {10.1109/NEMS.2009.5068765},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangLSWZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLT09,
author = {Yu Zhang and
Wen Jung Li and
Osamu Tabata},
title = {Extreme-low-power thermal convective accelerometer based on {CNT}
sensing element},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1040--1042},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068751},
doi = {10.1109/NEMS.2009.5068751},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangLT09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangSW09,
author = {Xingli Zhang and
Zhaowei Sun and
Guoqiang Wu},
title = {Molecular dynamics simulation on the out-of plane thermal conductivity
of monocrystal germanium thin-film},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {17--20},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068517},
doi = {10.1109/NEMS.2009.5068517},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangSW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangTXZLCLZH09,
author = {Jing Zhang and
Kaizhou Tan and
Siliu Xu and
Zhengfan Zhang and
Yukui Liu and
Guangbing Chen and
Kaicheng Li and
Heming Zhang and
Huiyong Hu},
title = {A novel p+ Poly-SiGe Gate {CMOS} device},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {480--484},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068623},
doi = {10.1109/NEMS.2009.5068623},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangTXZLCLZH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWLYWZZHX09,
author = {Yuping Zhang and
Yanyan Wang and
Lanxin Lv and
Shancheng Yan and
Haitao Wang and
Yong Zhang and
Dan Zhu and
Ningping Huang and
Zhongdang Xiao},
title = {Cell affinity of {PHBV} thin films evaluated by a parallel plate flow
chamber},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {653--656},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068665},
doi = {10.1109/NEMS.2009.5068665},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangWLYWZZHX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangYWZ09,
author = {Li Zhang and
Jun Yao and
Dajia Wang and
Hongsheng Zhong},
title = {Distributed {MEMS} transmission line-based uniplanar compact electromagnetic
bandgap {(UC-EBG)} tunable filters},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {494--497},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068626},
doi = {10.1109/NEMS.2009.5068626},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangYWZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangZLD09,
author = {Ru Zhang and
Ying Zhang and
Peilin Lang and
Yuwen Duan},
title = {Research of nano-material doped fiber in {SBS} slow light system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {980--982},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068737},
doi = {10.1109/NEMS.2009.5068737},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangZLD09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangZY09,
author = {Haijun Zhang and
Changsheng Zhu and
Qin Yang},
title = {Effect of effective viscosity on characteristics of microscale gas
journal bearings},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {121--125},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068540},
doi = {10.1109/NEMS.2009.5068540},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhangZY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLTC09,
author = {Gang Zhao and
Wen Li and
Guanrong Tang and
Jing Chen},
title = {Fabrication of bulk titanium out-of-plane microneedles},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {428--431},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068611},
doi = {10.1109/NEMS.2009.5068611},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaoLTC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLZZHL09,
author = {Pingan Zhao and
Yinqing Li and
Xiangyu Zeng and
Jia Zhou and
Yiping Huang and
Ran Liu},
title = {{EWOD} using P(VDF-TrFE)},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {202--205},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068559},
doi = {10.1109/NEMS.2009.5068559},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaoLZZHL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoTSC09,
author = {Gang Zhao and
Yao Tian and
Qiong Shu and
Jing Chen},
title = {Evalution of bulk titanium {DRIE} Using {SU-8} as soft mask},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {514--517},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068631},
doi = {10.1109/NEMS.2009.5068631},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaoTSC09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoYLDZY09,
author = {Jia Hao Zhao and
Shi Jie Yu and
Ke Li and
Ying Dong and
Qin Zhou and
Zheng You},
title = {Improvement of a micro-beam in a smart gas sensor with resonating
mechanism},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {371--375},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068598},
doi = {10.1109/NEMS.2009.5068598},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaoYLDZY09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoZL09,
author = {Xu Zhao and
Xin Zhao and
Guizhang Lu},
title = {State engine based validation of {MEMS} process sequences},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {215--218},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068562},
doi = {10.1109/NEMS.2009.5068562},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhaoZL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhengWSJZ09,
author = {Yunhuan Zheng and
Jianzhang Wu and
Jianbo Shao and
Qinghui Jin and
Jianlong Zhao},
title = {Development of a novel perfusion microfluidic cell culture device
for cell-based assays},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {257--260},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068572},
doi = {10.1109/NEMS.2009.5068572},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhengWSJZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhengWX09,
author = {Qinglong Zheng and
Zhuo Wang and
Yong Xu},
title = {Design and optimization of parylee nanomechanical cantilevers with
integrated piezoresistors for surface-stress based biochemical sensing},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {449--453},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068616},
doi = {10.1109/NEMS.2009.5068616},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhengWX09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouDNWW09,
author = {Yi Zhou and
Fei Ding and
Chao Ni and
Wei Wang and
Wengang Wu},
title = {Bottom-up fabrication of special parylene films based on selective
growth on Au-coated surface},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {441--444},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068614},
doi = {10.1109/NEMS.2009.5068614},
timestamp = {Tue, 13 Jun 2023 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/ZhouDNWW09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouHGLH09,
author = {Mingda Zhou and
Yilong Hao and
Chengchen Gao and
Zhihong Li and
Qifang Hu},
title = {Fabrication of complicated three dimensional structures utilizing
multi-stack bonding},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {1107--1111},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068767},
doi = {10.1109/NEMS.2009.5068767},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhouHGLH09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouSFLKWMCL09,
author = {Shengli Zhou and
Qing Shan and
Fei Fei and
Wen Jung Li and
Chung Ping Kwong and
Patrick C. K. Wu and
Bojun Meng and
Christina K. H. Chan and
Jay Y. J. Liou},
title = {Gesture recognition for interactive controllers using {MEMS} motion
sensors},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {935--940},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068728},
doi = {10.1109/NEMS.2009.5068728},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhouSFLKWMCL09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouWZ09,
author = {Wenli Zhou and
Sanping Wan and
Chao Zhu},
title = {Analysis on electro-thermal property of micro-bubble generator using
carbon nanotube heating elements},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {106--111},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068537},
doi = {10.1109/NEMS.2009.5068537},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZhouWZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZouCZZ09,
author = {Xudong Zou and
Kenle Chen and
Hualiang Zhang and
Jinwen Zhang},
title = {Design and simulation of 4-bit 10-14GHz {RF} {MEMS} tunable filter},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {21--24},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068518},
doi = {10.1109/NEMS.2009.5068518},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZouCZZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZouLZ09,
author = {Kui Zou and
Xiuhan Li and
Haixia Zhang},
title = {Transcutaneous power link design for implanted systems},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {763--766},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068690},
doi = {10.1109/NEMS.2009.5068690},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZouLZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZouSJZ09,
author = {Yuexian Zou and
Guangyi Shi and
Yufeng Jin and
Yali Zheng},
title = {Extraocular image processing for retinal prosthesis based on {DSP}},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {563--566},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068643},
doi = {10.1109/NEMS.2009.5068643},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZouSJZ09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZouZJS09,
author = {Yuexian Zou and
Yali Zheng and
Yufeng Jin and
Guangyi Shi},
title = {Signal modulation schemes comparison in the telemetry unit for retinal
prosthesis system},
booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
pages = {632--636},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://doi.org/10.1109/NEMS.2009.5068660},
doi = {10.1109/NEMS.2009.5068660},
timestamp = {Thu, 23 Mar 2023 00:00:00 +0100},
biburl = {https://dblp.org/rec/conf/nems/ZouZJS09.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2009,
title = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
publisher = {{IEEE} Computer Society},
year = {2009},
url = {https://ieeexplore.ieee.org/xpl/conhome/4982489/proceeding},
isbn = {978-1-4244-4629-2},
timestamp = {Wed, 16 Oct 2019 01:00:00 +0200},
biburl = {https://dblp.org/rec/conf/nems/2009.bib},
bibsource = {dblp computer science bibliography, https://dblp.org}
}
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