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"Layout decomposition for triple patterning lithography"

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Haitong Tian (2016)

Trier

Dagstuhl

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DOI: —

access: closed

type: Book or Thesis

metadata version: 2023-09-14

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Haitong Tian:
Layout decomposition for triple patterning lithography. University of Illinois Urbana-Champaign, USA, 2016

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last updated on 2023-09-14 15:14 CEST by the dblp team

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