"Moving Adaptive Unstructured 3-D Meshes in Semiconductor Process Modeling ..."

Andrew P. Kuprat et al. (1998)

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DOI: 10.1155/1998/15828

access: open

type: Journal Article

metadata version: 2023-05-08

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Andrew P. Kuprat, Denise George, Eldon Linnebur, Harold Trease, R. Kent Smith:
Moving Adaptive Unstructured 3-D Meshes in Semiconductor Process Modeling Applications. VLSI Design 6(1-4): 373-378 (1998)

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