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"Prognostics for Semiconductor Sustainability: Tool Failure Behavior ..."

Li Zhu, Junghui Chen, Chun-I Chen (2024)

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DOI: 10.1109/TSMC.2024.3359851

access: closed

type: Journal Article

metadata version: 2024-06-18

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Li Zhu, Junghui Chen, Chun-I Chen:
Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes. IEEE Trans. Syst. Man Cybern. Syst. 54(6): 3450-3460 (2024)

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