"An Efficient Scheduling Method for Single-Arm Cluster Tools With ..."

WenQing Xiong et al. (2023)

> Home

Details and statistics

DOI: 10.1109/TSMC.2022.3222915

access: closed

type: Journal Article

metadata version: 2023-06-15

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tsmc/XiongLQBHW23
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tsmc/XiongLQBHW23
WenQing Xiong, Jie Li, Yan Qiao, Liping Bai, Baoying Huang, NaiQi Wu:
An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules. IEEE Trans. Syst. Man Cybern. Syst. 53(6): 3270-3283 (2023)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.