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"An Efficient Scheduling Method for Single-Arm Cluster Tools With ..."
WenQing Xiong et al. (2023)
- WenQing Xiong
, Jie Li, Yan Qiao
, Liping Bai
, Baoying Huang
, NaiQi Wu
:
An Efficient Scheduling Method for Single-Arm Cluster Tools With Multifunctional Process Modules. IEEE Trans. Syst. Man Cybern. Syst. 53(6): 3270-3283 (2023)
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