"A New Scheduling Approach to Wafer-Residency-Time-Constrained Dual-Arm ..."

Jufeng Wang et al. (2025)

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DOI: 10.1109/TSMC.2025.3579615

access: closed

type: Journal Article

metadata version: 2025-10-06

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Jufeng Wang, Tingting Leng, Chunfeng Liu, MengChu Zhou, Side Zhao:
A New Scheduling Approach to Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools Concurrently Processing Multivariety Wafers. IEEE Trans. Syst. Man Cybern. Syst. 55(10): 7075-7084 (2025)

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