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"Behavior modeling and control of 300 mm fab intrabays using distributed ..."

Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei Huang (2003)

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DOI: 10.1109/TSMCA.2003.817395

access: closed

type: Journal Article

metadata version: 2020-05-25

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Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei Huang:
Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net. IEEE Trans. Syst. Man Cybern. Part A 33(5): 641-648 (2003)

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