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"Surface Reconstruction From Microscopic Images in Optical Lithography."

Virginia Estellers, Jean-Philippe Thiran, Maria Gabrani (2014)

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DOI: 10.1109/TIP.2014.2330791

access: closed

type: Journal Article

metadata version: 2020-05-10

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Virginia Estellers, Jean-Philippe Thiran, Maria Gabrani:
Surface Reconstruction From Microscopic Images in Optical Lithography. IEEE Trans. Image Process. 23(8): 3560-3573 (2014)

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