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"Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring ..."
Zuyang Zhang et al. (2025)
- Zuyang Zhang, Qiang-Xian Huang
, Huijie Liu
, Hongli Li
, Rongjun Cheng
, Liansheng Zhang
, Ruijun Li
:
Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine. IEEE Trans. Instrum. Meas. 74: 1-11 (2025)

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