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"Discrete Wavelet Transform and Radial Basis Neural Network for ..."

Wen-Ren Yang (2012)

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DOI: 10.1109/TIM.2011.2179824

access: closed

type: Journal Article

metadata version: 2020-06-08

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Wen-Ren Yang:
Discrete Wavelet Transform and Radial Basis Neural Network for Semiconductor Wet-Etching Fabrication Flow-Rate Analysis. IEEE Trans. Instrum. Meas. 61(4): 865-875 (2012)

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